Custom Ceramic Vacuum End Effector Wafer Loader Arm - High-Quality Solution

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Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams

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Zirconia used for wear resistant parts, heat resistant parts

Beryllium oxide ceramics with high thermal conductivity and low loss characteristics

Electrostatic chuck with compatibility, high-density, hight structural strength with customized

Wafer pin chuck used for semiconductor exposure device and wafer inspection device

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Custom Ceramic Vacuum End Effector Wafer Loader Arm - High-Quality Solution

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