Gida
Kayayyaki
Electrostatic chuck tare da dacewa, babban yawa, babban ƙarfin tsari tare da na musamman
Siffofin
Daidaituwa | Keɓancewa | Maɗaukaki Mai Girma | Ƙarfin Tsarin Ƙarfi | Lokacin Isar da Sauri | Mai tsada
Aikace-aikace
Lon-dasawa | Karamin Fim | Etch | Ci gaban Tsari | Zane Kayan Kayan Aiki
Zane da Kera
12 inch Fab da aka bayar don tabbatar da ainihin aikin, samar da sabuntawa da gyarawa, da kuma tabbatar da haɓakawa da ƙira.
Tare da kayan aiki na tsari da haɓaka fasahar fasaha na semiconductor da haɗaɗɗun da'ira, chucks na gargajiya na lantarki ta amfani da kayan polymer na halitta, ƙarfe oxides da kayan yumbu kamar yadda dielectrics ba su da cikakkiyar jituwa tare da irin waɗannan kayan kamar silicon wafers, saffir da silicon carbide. Saboda haka, electrostatic chucks masu jituwa tare da na farko, na biyu da na uku na semiconductor wafer grippers za su ci gaba a hankali.
Polymer Electrostatic Chuck / Heater
Polymer dielectric abu (Polymer) a halin yanzu mafi yadu amfani electrostatic chuck abu, ta shiri tsari ne kuma mafi girma, polymer dielectric abu bayan polymer gyara magani, lantarki, inji, zazzabi juriya, halogen juriya Properties za a ƙwarai inganta. An tsara kayan aikin dielectric ta hanyar sauran ayyukan haɗin gwiwa, sannan kuma an sanya su ta hanyar ɗaukar nauyi mai nauyi mai yawa, kuma an samar da ɗigon rufin dielectric mai yawa tsakanin na'urorin lantarki na ciki.
Polymer Electrostatic Chuck
Ana amfani da fasaha na gyara polymer don cimma mafi girman juriya mai girma da tsayin daka na dielectric, da samun ƙarin ƙarfi mai ƙarfi.
Abubuwan dielectric masu yawa na iya rage haɗarin ƙwayoyin cuta da rage motsin ion.
Bambance-bambancen abubuwa masu ɗaurewa na iya dacewa da haɗakar wafers na kayan daban-daban.
Kyakkyawan juriya na lalata a cikin halogen da yanayin plasma.
Babban aiki mai tsada, ɗan gajeren lokacin karɓa, dacewa da haɓaka tsarin samfuri da sabon tabbatar da haɓaka kayan aiki.
Polymer Electrostatic Chuck Tare da Heater
Yana iya gane layout na mahara dumama zafin jiki zones (har zuwa 20 zafin jiki zones), kuma yana da kyau dumama zafin uniformity (± 5% ℃ @ 150 ℃).
Ana amfani da fasahar laminating Vacuum don cimma babban yawa da yanayin zafi har zuwa 200 ° C.
Juyin dumama Uniform, tare da faɗin kewayon Saitunan lanƙwan zafin jiki.
Babban aiki mai tsada, ɗan gajeren lokacin karɓa, dacewa da haɓaka tsarin samfuri da sabon tabbatar da haɓaka kayan aiki.
Ceramics Electrostatic Chuck / Heater
Fasahar coagulation na yumbu shine ingantacciyar tsari na sintering a cikin haɓakar alumina/aluminum nitride yumbu electrostatic chucks da heaters. Mahimmancinsa shine amfani da nau'ikan nanometer diamita na yumbu foda, waɗanda aka gauraya ta wani ƙayyadadden ƙayyadaddun kayan aiki na musamman da tsarin hadawa. yumbu electrostatic chucks tare da babban yawa, barga crystal tsari da kuma uniform resistivity rarraba an sintered tare da wani sintering zafin jiki kwana a sintering kayan aiki. A tsaye chuck kerarre ta yumbu coagulation fasahar yana da babban yawa, barga crystal tsarin da kuma uniform girma resistivity rarraba, kuma zai iya gane al'ada clamping aikin guntu a cikin matsananci yanayi a karkashin high vacuum, plasma da halogen.
Al₂O₃ Electrostatic Chuck
Ana sarrafa ƙarfin juriya ta hanyar fasahar yumbura coagulation da tsarin haɗa wuta don samun ƙarfi mai tsayi.
Tsarin ciki na babban zafin jiki mai yawa yana da yawa kuma tsarin crystal ya tsaya tsayin daka, kuma ana iya samun ƙarfin riƙe da mafi girman tazara.
Haɗe-haɗen gyare-gyaren haɗin gwiwa yana rage ƙaura.
Dorewa aiki a cikin plasma halogen vacuum yanayi.
AlN Electrostatic Chuck
Ta hanyar sarrafa abun da ke ciki da kuma adadin kayan da aka yi da kanka, ana iya sarrafa ƙarfin juriya kuma ana iya samun ƙarfin riƙewa a cikin tazara mai girma.
Ana tabbatar da rarraba yankin zafin jiki iri ɗaya ta hanyar fasahar sintering da tsarin haɗin kai na tukwane.
Haɗaɗɗen gyare-gyaren haɗin gwiwa don haɓaka ingancin samfur.
Dorewa aiki a cikin plasma halogen vacuum yanayi.
Ceramics Electrostatic Chuck Tare da Heater
Yana iya gane layout na mahara dumama zafin jiki zones, kuma yana da kyau dumama zafin uniformity (± 7.5% ℃ @ 350 ℃).
Vacuum laminating sintering fasahar da ake amfani da su cimma musamman high densification da dumama yanayin zafi har zuwa 550 ℃.
Haɗaɗɗen gyare-gyaren haɗin gwiwa don haɓaka ingancin samfur.
Dorewa aiki a cikin plasma halogen vacuum yanayi.
Complex Nau'in Electrostatic Chuck / Heater
Zai iya dacewa da silicon, gallium arsenide, silicon carbide, sapphire na wafer clamping, na iya rage farashin canjin waya na masana'antun kayan aiki da masu amfani da ƙarshen. Dangane da kankare fasahar yumbu da fasaha na gyaran gyare-gyare na polymer, yin amfani da haɗaɗɗun injin lamination da fasahar haɗin kai mai zafi na iya rage juriya na ciki na electrostatic sucker, cimma daidaiton zafin jiki na ciki, samar da babban rufin rufin dielectric mai yawa don haɓaka aikin juriya na ion.
Complex Nau'in Electrostatic Chuck
Amfani da kankare yumbu da fasaha na gyaran gyare-gyare na polymer, yana da tsari mai yawa da ƙananan sakin gas.
Tsananin kulawa na dielectric Layer da kauri banki electrode.
Bambance-bambancen abubuwa masu matsewa na iya dacewa da matsewar wafers daban-daban.
Ana iya sarrafa juriya na jiki daidai don samun ƙarfin riƙewa mai ƙarfi na lantarki.
Babban aiki mai tsada, ɗan gajeren lokacin karɓa, dacewa da haɓaka tsarin samfuri da sabon tabbatar da haɓaka kayan aiki.
Complex Type Electrostatic Chuck Tare da Heater
Yana iya gane layout na mahara dumama zafin jiki zones, kuma yana da kyau dumama zazzabi uniformity (± 3.5% ℃ @ 150 ℃).
Ana amfani da fasahar laminating Vacuum don cimma babban yawa da yanayin zafi har zuwa 200 ° C.
Juyin dumama Uniform, tare da faɗin kewayon Saitunan lanƙwan zafin jiki.
Babban aiki mai tsada, ɗan gajeren lokacin karɓa, dacewa da haɓaka tsarin samfuri da sabon tabbatar da haɓaka kayan aiki.