Gida
Babban samfuri
Microporous Ceramic Vacuum Chuck
Fasalolin injin yumbura
Ƙarfin ƙarfi mai ƙarfi: daidaituwar iska mai daidaituwa da haɓakar ruwa, don tabbatar da ƙarfin ɗaiɗaiɗɗa da ɗaukar nauyin wafer silicon a cikin aikin niƙa ba tare da zamewa ba.
M da kuma uniform tsarin: tallafi na micro-porous yumbu abu tare da m da kuma uniform tsarin, wanda ba sauki adsorb silicon ƙura, da chuck ne mai sauki da za a tsabtace.
High ƙarfi: babu nakasawa a lokacin nika, don tabbatar da cewa silicon wafer ne a ko'ina danniya a kowane batu a lokacin da nika, kuma shi ne ba sauki faruwa da mamaki na gefen rushewa, tarkace.
Rayuwa mai tsawo: riƙewar siffar fuskar yana da kyau, sake zagayowar sutura yana da tsawo kuma adadin sutura yana da ƙananan, don haka yana da rayuwa mai girma.
Tufafi mai sauƙi: ba za a sami tsagewa ba, ɓarna, abubuwan masussuka lokacin tufa.
Nauyin nauyi: Saboda tsarin ciki na pores, ƙayyadaddun ƙimar nauyi shine 1.6-2.8.
Babban rufi: kayan da aka rufe, kawar da wutar lantarki.
Daidaiton Gudanarwa
| category | Kayan tushe | Adsorption surface abu | Girman | Lalata | zurfin daidaito |
| Kumburi mara kyau | Aluminum Alloy | Matsakaicin SIC | ≤12 μm | ≤15 μm | ≤20 μm |
| Bakin karfe | ≤10 μm | ≤15 μm | |||
| Alumina | ≤5 μm | ≤8m ku | |||
| Silicon Carbide | ≤3 μm | ≤8m ku | |||
| The porous yumbu Chuck yana da cikakken kewayon bayani dalla-dalla da kuma girma dabam, wanda za a iya amfani da a cikin 3-inch line, 4-inch line, 5-inch line, 6-inch line, 8-inch line da 12-inch line, da kuma 12-inch line. za a iya keɓancewa bisa ga ƙayyadaddun bayanai da girman da kuke buƙata. | |||||
| Matsakaicin girman yanayin halin yanzu shine: 1600 * 1600m, kauri shine 50mm; | |||||
Halayen kayan yumbu mara kyau:
Babban sinadaran: alumina Launi: baki, launin toka na baƙin ƙarfe
Abubuwan da ke cikin Alumina: 92% Abubuwan da ke ciki: 0%
Buɗewa: 2 ~ 30um Ƙarfin ƙarfi: 35 ~ 40%
Ƙarfin lanƙwasawa: 6kgf/cm2 (Mpa) Girman girma: 2.28g/cm3
Nau'in yumbura
Dangane da amfani, Ceramic chuck sun kasu zuwa:
Na'ura mai laushi sanye take da: abrasive disc chuck, silicon wafer, sapphire substrate da sauran thinning;
Na'urar yankan tana sanye take da: chuck na rubutu, wafer silicon, wafer fili na semiconductor da sauran yankan;
Na'urar tsaftacewa sanye take da: chuck mai tsabta;
Na'urar cire fim tana sanye take da: cire fim din chuck;
Laminating inji sanye take da: laminating chuck;
Na'urar bugu sanye take da: buguwar bugu.
Tabbatar da inganci
Fountyl yana da shekaru da yawa na ƙwarewar fasaha game da daidaitaccen yumbu na injiniya da ingantaccen aiki da masana'antu, nau'ikan kayan bincike na zahiri da na sinadarai da kayan auna geometric, don tabbatar da daidaiton samarwa da daidaiton samfur don yumbu chuck.
Aikace-aikacen samfur
Porous chuck (adsorption tebur aiki) wani sashi ne da aka yi amfani da shi a matakin masana'anta na semiconductor kuma an haɗa shi akan injin rubutu ko na'urar dubawa. Samfuri ne wanda zai iya amfani da tsari mai ƙyalƙyali da matsi mara kyau na saman bench ɗin don kiyaye wafer siliki na bakin ciki lebur. Injin rubutun yana yanke wafer silicon tare da faɗin kusan 20μm, don haka buƙatun da ake buƙata don flatness da daidaiton farfajiyar tallan wafer suna da girma sosai. Dangane da halaye daban-daban, nau'ikan nau'ikan pore daban-daban suna da jeri na aikace-aikacen daban-daban, irin su tukwane na microporous tare da babban yanki na musamman da ƙananan girman pore, galibi ana amfani da su a cikin tacewa na kwayan cuta da filayen gyaran ƙwayoyin cuta; Mesoporous yumbura tare da takamaiman diamita rarraba yawanci amfani da rabuwa, adsorption catalysis filayen. Macroporous tukwane yawanci dace da m tacewa na abubuwa da babban abun ciki da kuma babban size.