Tsev
Cov khoom tseem ceeb
Square beam & qhia rail rau ultra-precision motion platform thiab nrhiav kom tau cov khoom
Siv lub tshuab nqus tsev chuck los ua piv txwv, cov khoom siv thaum ntxov 2 nti thiab 4 nti wafer era yog aviation txhuas, tab sis nws tau ntsib lub bottleneck ntawm ultra-siab flatness (zoo dua 1 micron) nyob rau hauv lub era ntawm loj-loj. wafers (8 "thiab ntau dua 8"), uas tsis tuaj yeem ua tau raws li qhov nyuaj ntawm kev ua haujlwm siab thiab raug tshem tawm. Tom ntej no, alumina cov ntaub ntawv raws li ib tug kev hloov, nws elastic modulus, lub teeb yuag, thermal conductivity thiab expansion coefficient thiab silicon carbide dwarf, tab sis tsis nyob rau hauv ib co txaj muag; Tom qab qhov kev ua tiav hauv kev npaj thev naus laus zis ntawm qhov loj-loj thiab txoj haujlwm tshwj xeeb zoo li lub hollow qauv silicon carbide ceramics, cov khoom xws li ultra-precision workpiece puag, ultra-precision cua ntab qhia, thiab wafer kis caj npab tau hloov kho dua tshiab.
Tsis tsuas yog cov saum toj no-hais silicon carbide ceramic qhov chaw uas ua tau raws li ultra-siab precision hard indicators ntawm flatness, parallelism, thiab verticality, rau high-purity silicon carbide ceramic qhov chaw yuav tsum tau rau lub wafer diffusion, doping, etching txheej txheem nyob rau hauv lub semiconductor kev lag luam. , tshwj xeeb tshaj yog nyob rau hauv high-purity CVDSiC cov ntaub ntawv npaj technology, muaj ib tug paub tab txheej txheem technology, thiab tau pom tau hais tias cov khoom siv high-purity silicon carbide ceramic siv lead ua nkoj, silicon carbide ceramic bearing phaj, silicon carbide ceramic cua floating txav platform, silicon carbide ultra -precision txav platform, silicon carbide qhia rail, silicon carbide swb rail Cheebtsam.
Nyob rau hauv lub neej yav tom ntej, peb yuav ntxiv nthuav daim ntawv thov ntawm silicon carbide cov ntaub ntawv nyob rau hauv semiconductor kev lag luam thiab pab txhawb rau kev kho dua tshiab ntawm semiconductor kev lag luam saw thiab silicon carbide ceramic kev lag luam. Tuam Tshoj tus precision silicon carbide ceramic Cheebtsam ywj siab kev tshawb fawb thiab domestic daim ntawv thov nce qib tau nyuam qhuav pib, nrog rau kev loj hlob ntawm kev lag luam semiconductor, kev lag luam thov rau hom high-end ceramic qauv yuav ntau thiab ntau loj, silicon carbide nrog nws zoo heev lub cev thiab Cov khoom siv tshuaj lom neeg, hauv kev lag luam semiconductor muaj kev thov dav dav.
Silicon carbide ceramics tsis tsuas yog muaj cov cuab yeej zoo heev ntawm chav tsev kub, xws li siab khoov lub zog, zoo heev oxidation tsis kam, zoo corrosion kuj, siab hnav tsis kam thiab tsis tshua muaj kev sib txhuam coefficient, tab sis kuj kub kub mechanical zog (lub zog, creep resistance, etc.) yog cov paub zoo tshaj plaws cov ntaub ntawv ceramic. Silicon carbide muaj cov yam ntxwv ntawm kev tiv thaiv corrosion, kub tsis kam, siab zog, zoo thermal conductivity, cuam tshuam tsis kam ... thiab lwm yam.
Cov kev cai ntawm lub tshuab lithography rau workpiece rooj qauv: Ultra-lub teeb (txo qis zog inertia, txo lub cev muaj zog load), ultra-siab stability (ultra-precision machining yuav tsum tau high-precision suab thiab positioning, yuav tsum tau tsawg kawg nkaus deformation ntawm thermal expansion thiab lwm yam. ), kev huv huv (siab hardness thiab siab hnav tsis kam), Nws tuaj yeem ua tau raws li cov kev cai ntawm qhov loj me, hollow nyias phab ntsa, complex qauv thiab precision silicon carbide structural qhov chaw rau cov khoom tseem ceeb ntawm integrated circuit manufacturing sawv cev los ntawm photolithography tshuab.
Fountyl Peev Xwm
Qhov loj tshaj plaws:1600 hli.
Structure customization:Lub teeb yuag qauv, tuaj yeem tsim los txo cov qauv hnyav.
High precision:Flatness tuaj yeem tswj tau li ntawm 5 microns lossis ntau dua qhov tseeb.