Ụlọ
Ngwaahịa
Electrostatic Chuck nwere ndakọrịta, njupụta dị elu, ike nhazi dị elu yana ahaziri
Atụmatụ
Ndakọrịta | Nhazi | Njupụta dị elu | Ike Ọdịdị Dị Elu | Oge nnyefe ngwa ngwa | Ọnụ-dị irè
Ngwa
Lon-ịkụnye | Ihe nkiri dị mkpa | Etch | Mmepe usoro | Nhazi akụrụngwa
Imepụta na nrụpụta
12 inch Fab ewepụtara iji nyochaa arụmọrụ n'ezie, nye mmeghari na nrụzi, yana nyochaa mmepe na imewe.
Na usoro akụrụngwa na usoro technology mmepe nke semiconductor na integrated circuit, na omenala electrostatic chucks iji organic polymer ihe, metal oxides na seramiiki ihe dị ka dielectrics na-adịghị n'ụzọ zuru ezu dakọtara na ndị dị otú ahụ dị ka silicon wafers, sapphire na silicon carbide. Ya mere, chucks electrostatic dakọtara na nke mbụ, nke abụọ na ọgbọ nke atọ semiconductor wafer grippers ga-eji nwayọọ nwayọọ tolite.
Polymer Electrostatic Chuck / Igwe ọkụ
Polymer dielectric ihe (Polymer) bụ ihe a na-ejikarị eme ihe n'ọtụtụ ebe electrostatic chuck, usoro nkwadebe ya bụkwa ihe kachasị tozuru okè, polymer dielectric ihe mgbe polymer mgbanwe ọgwụgwọ, eletriki, n'ibu, okpomọkụ na-eguzogide, halogen iguzogide Njirimara ga-ukwuu mma. The dielectric ihe na- patterned ndị ọzọ integrated arụmọrụ, na wee layered site multistage agụụ ibu arọ, na ok dielectric mkpuchi oyi akwa na-guzobere n'etiti esịtidem electrodes.
Polymer Electrostatic Chuck
A na-eji teknụzụ mgbanwe polymer iji nweta nnukwu resistivity dị elu yana mgbe niile dielectric, wee nweta ike njigide kwụsiri ike.
Ihe dielectric dị elu nwere ike ibelata ihe ize ndụ nke ihe dị iche iche ma belata mmegharị ion.
Ihe dị iche iche nke ihe na-akụda nwere ike dakọtara na nkwụsị nke wafers nke ihe dị iche iche.
Ezigbo nguzogide corrosion na halogen na ikuku plasma.
Ọnụ ahịa dị elu, obere oge nnabata, dabara maka mmepe usoro ngwaahịa na nkwenye mmepe akụrụngwa ọhụrụ.
Polymer Electrostatic Chuck na Heater
Ọ nwere ike na-aghọta okirikiri nhọrọ ukwuu kpo oku zones (ruo 20 okpomọkụ zones), na nwere ezigbo kpo oku okpomọkụ uniformity (± 5% ℃ @ 150 ℃).
A na-eji teknụzụ vacuum laminating iji nweta njupụta dị oke elu na ikpo ọkụ ruo 200 Celsius.
Usoro ikpo ọkụ n'otu n'otu, yana ọtụtụ ntọala usoro mgbanaka okpomọkụ.
Ọnụ ahịa dị elu, obere oge nnabata, dabara maka mmepe usoro ngwaahịa na nkwenye mmepe akụrụngwa ọhụrụ.
Ceramics Electrostatic Chuck / Heater
Nkà na ụzụ coagulation seramiiki bụ usoro nhịahụ ka mma na mmepe nke alumina / aluminom nitride ceramic electrostatic chucks na heaters. Isi ya bụ iji ihe dị iche iche nke nanometer dayameta seramiiki powders, nke a na-agwakọta n'otu akụkụ site na ngwa ngwa ngwakọta pụrụ iche na usoro ngwakọta. Seramiiki electrostatic chucks nwere nnukwu njupụta, ihe owuwu kristal kwụsiri ike na nkesa n'otu n'otu ka ejiri ụfọdụ usoro okpomọkụ na-eme mkpọtụ na ngwa ngwa. The static chuck arụpụtara site na seramiiki coagulation teknụzụ nwere nnukwu njupụta, ihe owuwu kristal kwụsiri ike na nkesa oke olu, ma nwee ike ịghọta ọrụ mgbachi nkịtị nke mgbawa na gburugburu ebe siri ike n'okpuru nnukwu agụụ, plasma na halogen.
Al₂O₃ Electrostatic Chuck
A na-achịkwa olu resistivity site na teknụzụ seramiiki coagulation na usoro ntinye aka iji nweta ike njide ogologo.
Ihe owuwu dị n'ime nke ikpo ọkụ dị elu dị oke ma kristal ahụ kwụsiri ike, enwere ike nweta ikike ijide ogologo oge okpomọkụ.
Ịkpụzi ihe jikọrọ ọnụ na-ebelata mbugharị ion.
Arụ ọrụ na-adịgide adịgide na ikuku halogen vacuum plasma.
Ọnụ ego nke AlN Electrostatic Chuck
Site n'ịchịkwa ihe mejupụtara na oke nke ihe eji eme ihe, enwere ike ịchịkwa olu resistivity na ike ijide n'ime oge okpomọkụ ka ukwuu.
A na-ahụ maka nkesa mpaghara okpomọkụ otu ahụ site na teknụzụ sintering na usoro ntinye ọkụ nke ceramik.
Ịkpụzi ihe ejikọtara ọnụ iji bulie ogo ngwaahịa.
Arụ ọrụ na-adịgide adịgide na ikuku halogen vacuum plasma.
Ceramics Electrostatic Chuck na kpo oku
Ọ nwere ike na-aghọta okirikiri nhọrọ ukwuu nke kpo oku okpomọkụ zones, na nwere ezi kpo oku okpomọkụ uniformity (± 7.5% ℃ @ 350 ℃).
A na-eji teknụzụ vacuum laminating sintering iji nweta oke densification na ikpo ọkụ ruo 550 ℃.
Ịkpụzi ihe ejikọtara ọnụ iji bulie ogo ngwaahịa.
Arụ ọrụ na-adịgide adịgide na ikuku halogen vacuum plasma.
Ụdị mgbagwoju anya Electrostatic Chuck / Heater
Nwere ike dakọtara na silicon, gallium arsenide, silicon carbide, sapphire of wafer clamping, nwere ike ibelata ụgwọ mgbanwe waya nke ndị na-emepụta akụrụngwa na ndị ọrụ njedebe. Dabere na teknụzụ seramiiki kọmpụta na teknụzụ mgbanwe polymer, iji teknụzụ na-ejikọta oghere na teknụzụ na-ekpo ọkụ nwere ike belata nguzogide okpomọkụ nke electrostatic sucker, nweta ịdị n'otu ọnọdụ okpomọkụ, na-etolite akwa mkpuchi mkpuchi dielectric iji meziwanye arụmọrụ nguzogide ion.
Ụdị mgbagwoju anya Electrostatic Chuck
Ojiji nke seramiiki na teknụzụ mgbanwe polymer, nwere usoro dị elu dị elu yana ntọhapụ gas dị ala.
Mkpịsị aka ike nke dielectric oyi akwa na electrode akụ ọkpụrụkpụ.
Ihe dị iche iche nke ihe mgbochi nwere ike dakọtara na nkwụsị nke wafers dị iche iche.
Enwere ike ịchịkwa resistivity nke ahụ n'ụzọ ziri ezi iji nweta ikike njide electrostatic siri ike.
Ọnụ ahịa dị elu, obere oge nnabata, dabara maka mmepe usoro ngwaahịa na nkwenye mmepe akụrụngwa ọhụrụ.
Ụdị mgbagwoju anya Electrostatic Chuck na Igwe ọkụ
Ọ nwere ike na-aghọta okirikiri nhọrọ ukwuu nke kpo oku okpomọkụ zones, na nwere ezi kpo oku okpomọkụ uniformity (± 3.5% ℃ @ 150 ℃).
A na-eji teknụzụ vacuum laminating iji nweta njupụta dị oke elu na ikpo ọkụ ruo 200 Celsius.
Usoro ikpo ọkụ n'otu n'otu, yana ọtụtụ ntọala usoro mgbanaka okpomọkụ.
Ọnụ ahịa dị elu, obere oge nnabata, dabara maka mmepe usoro ngwaahịa na nkwenye mmepe akụrụngwa ọhụrụ.