Oghere mgbịrịgba & okporo ụzọ ntuziaka maka ikpo okwu ngagharị na ngwa nchọpụta
Na-ewere mgbakọ vacuum chuck dị ka ihe atụ, ihe eji eme ihe na mbụ 2 inch na 4 inch wafer oge bụ aluminom ụgbọ elu, ma ọ zutere mkpọmkpọ nke ultra-high flatness (mma karịa 1 micron) na oge nke nnukwu-size. wafers (8 "na karịa 8"), nke na-enweghị ike izute ike index nke ultra-high flatness wee kpochapụ. Na-esote, ihe alumina dị ka mgbanwe, modul ya na-agbanwe agbanwe, ịdị arọ dị arọ, conductivity thermal and expansion coefficient na silicon carbide dwarf, ma ọ bụghị na ụfọdụ ihere; Mgbe ihe ịga nke ọma na nkwadebe technology nke nnukwu-size na mgbagwoju pụrụ iche ekara oghere Ọdịdị silicon carbide ceramics, components gụnyere ultra-nkenke workpiece isi, ultra-nkenke ikuku sere n'elu ndu, na wafer nnyefe ogwe aka kwalite.
Ọbụghị naanị akụkụ seramiiki silicon carbide ndị a kpọtụrụ aha n'elu nke na-ezute ihe ngosi siri ike dị oke elu na flatness, parallelism, and verticality, maka akụkụ seramiiki silicon carbide dị ọcha chọrọ maka mgbasa wafer, doping, usoro etching na ụlọ ọrụ semiconductor. , karịsịa na elu-ọcha CVDSiC ihe technology technology, nwere a tozuru okè usoro technology, na ghọtara na mmepụta nke elu-ọcha silicon carbide seramiiki kristal ụgbọ mmiri, silicon carbide seramiiki bearing efere, silicon carbide seramiiki ikuku sere n'elu ikpo okwu, silicon carbide ultra. -nkenke na-akpụ akpụ n'elu ikpo okwu, ụgbọ okporo ígwè silicon carbide, silicon carbide slide rail components.
N'ọdịnihu, anyị ga-agbasawanye ngwa nke silicon carbide ihe na semiconductor ụlọ ọrụ na-enye aka na nkwalite nke semiconductor ụlọ ọrụ yinye na silicon carbide seramiiki ụlọ ọrụ. Ngwa nyocha nke silicon carbide seramiiki nke China ka ebidola nyocha onwe ya na nkwalite ngwa ụlọ ka amalitela, site na mmepe siri ike nke ụlọ ọrụ semiconductor, ahịa ahịa maka ụdị ụdị seramiiki dị elu ga-abawanye ụba, silicon carbide nwere ọmarịcha anụ ahụ na nke anụ ahụ. Njirimara kemịkalụ, na ụlọ ọrụ semiconductor nwere atụmanya ngwa sara mbara.
Silicon carbide ceramics ọ bụghị naanị nwere ezigbo ihe eji arụ ọrụ na ụlọ okpomọkụ, dị ka ike na-ehulata dị elu, nguzogide oxidation dị mma, ezigbo nguzogide corrosion, oke iyi na-eguzogide na obere esemokwu esemokwu, kamakwa akụrụngwa akụrụngwa okpomọkụ dị elu (ike, nguzogide creep, wdg). bụ ihe ndị a maara nke ọma seramiiki . Silicon carbide nwere njirimara nke nguzogide corrosion, oke okpomọkụ na-eguzogide, ike dị elu, ezigbo okpomọkụ conductivity, mmetụta nkwụsị ... wdg.
Ihe ndị a chọrọ maka igwe lithography maka nhazi tebụl workpiece: Ultra-fefe (belata inertia ngagharị, belata ibu moto), nkwụsi ike dị elu (machining ultra-nkenke na-achọ mmegharị ziri ezi na ọnọdụ dị elu, chọrọ nrụrụ obere akụkụ nke mgbasawanye ọkụ na ihe ndị ọzọ). ), ịdị ọcha (isi ike dị elu na nguzogide dị elu), Ọ nwere ike izute teknụzụ chọrọ nke nnukwu nha, mgbidi dị warara, usoro mgbagwoju anya na akụkụ nhazi nke silicon carbide ziri ezi maka ngwa isi nke nrụpụta sekit agbakwunyere na-anọchi anya igwe fotolithography.
Ike Fountyl
Oke kacha:1600mm.
Nhazi nhazi:ihe owuwu dị fechaa, enwere ike ime ya iji belata ihe owuwu ibu.
Oke izi ezi:Enwere ike ịchịkwa flatness n'ime microns 5 ma ọ bụ ọbụna nke ọma karịa.