He kurupae tapawha me te reera arahi mo te papa nekehanga tino tika me nga taputapu rapu

Ko te tango i te huihuinga chuck korehau hei tauira, ko nga mea i whakamahia i te waa o mua 2 inihi me te 4 inihi angiangi he konumohe rererangi, engari kua pa ki te pounamu o te papatahi ultra-tiketike (he pai ake i te 1 micron) i te waa o te rahi-rahi. angiangi (8 "me te neke atu i te 8"), e kore e taea te whakatutuki i te taupū pakeke o te papatahi ultra-tiketike ka whakakorehia. I muri mai, ko nga mea alumina hei whakawhiti, ko tona whakanekehanga rapa, te taumaha marama, te kawe waiariki me te whakarea roha me te papaka carbide silicon, engari kaore i runga i etahi mea whakama; I muri i te pakaruhanga i roto i te hangarau whakarite o te rahi-rahi, me te matatini motuhake-ahua kowhao te hanga silicon carbide ceramics, wāhanga tae atu ultra-pū turanga mahi, ultra-pū aratohu rererangi rererangi, me te angiangi ringa tuku kua whakapai ake.

Ehara i te mea ko nga waahanga karaima silicon carbide kua whakahuahia i runga ake nei e tutuki ana i nga tohu tino maamaa teitei mo te papatahi, te whakarara, me te poutū, mo nga waahanga karaima silicon carbide parakore e hiahiatia ana mo te wafer diffusion, doping, etching process i roto i te ahumahi semiconductor. , ina koa i roto i te hangarau whakarite rauemi CVDSiC tino parakore, he hangarau tukanga pakeke, a kua mohio ki te hanga o te poti karaihe karaima silicon carbide parakore teitei, te pereti carbide ceramic te pereti, te silicon carbide ceramic rangi e rere ana te papa nekehanga, te silicon carbide ultra -pupapa neke tika, reera arataki carbide silicon carbide, nga waahanga reera reirangi carbide.

I te wa kei te heke mai, ka whakawhānuihia e matou te tono o nga rawa carbide silicon i roto i te ahumahi semiconductor me te whai waahi ki te whakapai ake i te mekameka ahumahi semiconductor me te ahumahi silicon carbide ceramic. Ko nga waahanga o te karaehe silicon carbide o Haina kua timata te rangahau motuhake me te whakatairanga tono a-whare, me te kaha o te whakawhanaketanga o te ahumahi semiconductor, ko te hiahia o te maakete mo tenei ahua o te hanganga uku teitei ka nui ake te nui, te carbide silicon me tona tinana tino pai. āhuatanga matū, i roto i te ahumahi semiconductor he whānui tono opuaraa.