Kunyumba
Zogulitsa
Electrostatic chuck yogwirizana, kachulukidwe kwambiri, mphamvu zamapangidwe apamwamba ndi makonda
Mawonekedwe
Kugwirizana | Kusintha mwamakonda | Kuchuluka Kwambiri | Mphamvu Zazikulu Zazikulu | Nthawi Yotumizira Mwachangu | Zotsika mtengo
Mapulogalamu
Lon-implantation | Kanema Woonda | Eti | Kukula kwa Njira | Zida Zopangira
Kupanga ndi Kupanga
12 inch Fab yoperekedwa kuti itsimikizire momwe ikugwirira ntchito, kupereka kukonzanso ndi kukonza, ndikutsimikizira chitukuko ndi mapangidwe.
Ndi zida ndondomeko ndi ndondomeko luso chitukuko cha semiconductor ndi dera Integrated, miyambo electrostatic chucks ntchito organic polima zipangizo, oxides zitsulo ndi zipangizo ceramic monga dielectrics si mokwanira n'zogwirizana ndi zipangizo monga pakachitsulo yopyapyala, safiro ndi pakachitsulo carbide. Choncho, chucks electrostatic n'zogwirizana ndi woyamba, wachiwiri ndi wachitatu m'badwo semiconductor yopyapyala grippers adzakhala pang'onopang'ono kukhala.
Polima Electrostatic Chuck / Heater
Polima dielectric chuma (Polymer) pakali pano amagwiritsidwa ntchito kwambiri electrostatic chuck zakuthupi, kukonzekera kwake ndi okhwima kwambiri, polima dielectric zinthu pambuyo polima kusinthidwa mankhwala, magetsi, makina, kutentha kukana, halogen kukana katundu adzakhala bwino kwambiri. Zinthu za dielectric zimatengera magwiridwe antchito ena ophatikizika, kenako ndikuwunjika ndi multistage vacuum heavy load, ndipo wosanjikiza wandiweyani wa dielectric insulation umapangidwa pakati pa maelekitirodi amkati.
Polymer Electrostatic Chuck
Ukadaulo wosintha ma polima umagwiritsidwa ntchito kuti akwaniritse zochulukirapo zochulukirapo komanso kusinthasintha kwa dielectric, ndikupeza mphamvu yolimba yolimba.
Zida za dielectric zamphamvu kwambiri zimatha kuchepetsa chiwopsezo cha tinthu tating'onoting'ono ndikuchepetsa kuyenda kwa ion.
Kusiyanasiyana kwa zinthu zokhotakhota kumatha kukhala kogwirizana ndi kumangirira kwa ma wafer azinthu zosiyanasiyana.
Kukana kwabwino kwa dzimbiri mu halogen ndi plasma atmospheres.
Kugwira ntchito kwamtengo wapatali, nthawi yochepa yovomerezeka, yoyenera pa chitukuko cha ndondomeko ya mankhwala ndi chitsimikizo cha chitukuko cha zida zatsopano.
Polima Electrostatic Chuck Ndi Heater
Imatha kuzindikira masanjidwe a magawo ambiri otentha otentha (mpaka 20 zone kutentha), ndipo imakhala ndi kutentha kwabwino kwa kutentha (± 5% ℃@150 ℃).
Tekinoloje ya vacuum laminating imagwiritsidwa ntchito kuti ikwaniritse kachulukidwe kwambiri komanso kutentha kutentha mpaka 200 ° C.
Kutentha kofananira kopindika, kokhala ndi zokonda zosiyanasiyana zopindika kutentha.
Kugwira ntchito kwamtengo wapatali, nthawi yochepa yovomerezeka, yoyenera pa chitukuko cha ndondomeko ya mankhwala ndi chitsimikizo cha chitukuko cha zida zatsopano.
Ceramics Electrostatic Chuck / Heater
Tekinoloje ya Ceramic coagulation ndi njira yabwino yopangira sintering pakupanga aluminiyamu nitride ceramic chucks electrostatic electrostatic chucks ndi ma heaters. Pachimake chake ndi kugwiritsa ntchito mitundu yosiyanasiyana ya nanometer m'mimba mwake ufa wa ceramic, womwe umasakanizidwa mu gawo lina kudzera mu zida zapadera zosanganikirana ndi kusanganikirana. Ceramic electrostatic chucks ndi kachulukidwe mkulu, khola galasi kapangidwe ndi yunifolomu resistivity kugawa anali sintered ndi ena sintering kutentha pamapindikira mu sintering zida. The static chuck yopangidwa ndi ukadaulo wa ceramic coagulation imakhala ndi kachulukidwe kwambiri, mawonekedwe okhazikika a kristalo komanso kugawa kofananako kokwanira, ndipo imatha kuzindikira momwe chip chimagwirira ntchito m'malo ovuta kwambiri pansi pa vacuum, plasma ndi halogen.
Al₂O₃ Electrostatic Chuck
Voliyumu resistivity imayendetsedwa ndi ukadaulo wa coagulation ceramic komanso njira yowombera kuti mupeze mphamvu yayitali.
Mapangidwe amkati a kutentha kwa sintering ndi wandiweyani ndipo mawonekedwe a kristalo ndi okhazikika, ndipo mphamvu yogwiritsira ntchito kutentha kwakukulu imatha kupezeka.
Kuwotcha kophatikizana kophatikizana kumachepetsa kusamuka kwa ion.
Ntchito yokhalitsa mu plasma halogen vacuum atmosphere.
AlN Electrostatic Chuck
Poyang'anira kapangidwe kake ndi kuchuluka kwa zinthu za konkriti, mphamvu yamphamvu yoletsa mphamvu imatha kuwongoleredwa ndipo mphamvu yogwira munyengo yayikulu yotentha imatha kupezeka.
Kugawidwa kwa yunifolomu ya kutentha kumatsimikiziridwa ndi teknoloji ya sintering ndi njira yowombera pamodzi ndi zoumba za konkire.
Integrated co-firing molding kuti muwonjezere khalidwe lazogulitsa.
Ntchito yokhalitsa mu plasma halogen vacuum atmosphere.
Ceramics Electrostatic Chuck With Heater
Imatha kuzindikira masanjidwe a magawo angapo otentha otentha, ndipo imakhala ndi kutentha kwabwino kotentha (± 7.5% ℃@350 ℃).
Vuto laminating sintering luso ntchito kukwaniritsa kachulukidwe kwambiri ndi kutentha kutentha mpaka 550 ℃.
Integrated co-firing molding kuti muwonjezere khalidwe lazogulitsa.
Ntchito yokhalitsa mu plasma halogen vacuum atmosphere.
Mtundu Wovuta wa Electrostatic Chuck / Heater
Ikhoza kukhala yogwirizana ndi silicon, gallium arsenide, silicon carbide, safiro wa wafer clamping, imatha kuchepetsa mtengo wosinthira waya wa opanga zida ndi ogwiritsa ntchito mapeto. Kutengera ukadaulo wa konkriti wa ceramic ndi ukadaulo wosinthira polima, kugwiritsa ntchito ukadaulo wophatikizika wa vacuum ndi ukadaulo wolumikizana wotentha kumatha kuchepetsa kukana kwamkati kwamafuta a electrostatic sucker, kukwaniritsa kutentha kwamkati, kupanga wosanjikiza wandiweyani wa dielectric kuti apititse patsogolo kukana kwa ion kusamuka.
Complex Type Electrostatic Chuck
Kugwiritsa ntchito ukadaulo wa konkriti wa ceramic ndi polima kusinthidwa, kumakhala ndi mawonekedwe apamwamba kwambiri komanso kutsika kwa gasi.
Kuwongolera kolimba kwa wosanjikiza wa dielectric ndi makulidwe a banki ya electrode.
Kusiyanasiyana kwa zinthu zokhotakhota kumatha kukhala kogwirizana ndi kumangirira kwamitundu yosiyanasiyana.
Kulimbana ndi thupi kumatha kuyendetsedwa molondola kuti mupeze mphamvu yamphamvu yamagetsi.
Kugwira ntchito kwamtengo wapatali, nthawi yochepa yovomerezeka, yoyenera pa chitukuko cha ndondomeko ya mankhwala ndi chitsimikizo cha chitukuko cha zida zatsopano.
Complex Type Electrostatic Chuck With Heater
Itha kuzindikira masanjidwe a magawo angapo otenthetsera kutentha, ndipo imakhala ndi kutentha kwabwino kwa kutentha (± 3.5% ℃@150 ℃).
Tekinoloje ya vacuum laminating imagwiritsidwa ntchito kuti ikwaniritse kachulukidwe kwambiri komanso kutentha kutentha mpaka 200 ° C.
Kutentha kofananira kopindika, kokhala ndi zokonda zosiyanasiyana zopindika kutentha.
Kugwira ntchito kwamtengo wapatali, nthawi yochepa yovomerezeka, yoyenera pa chitukuko cha ndondomeko ya mankhwala ndi chitsimikizo cha chitukuko cha zida zatsopano.