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Ibicuruzwa
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Electrostatic chuck hamwe nubwuzuzanye, ubwinshi-bwinshi, imbaraga zubaka hamwe na progaramu
Ibiranga
Guhuza | Guhitamo | Ubucucike Bwinshi | Imbaraga Zirenze Inzego | Igihe cyo Gutanga Byihuse | Ikiguzi
Porogaramu
Kwimika wenyine | Filime Ntoya | Etch | Gutezimbere Inzira | Igishushanyo mbonera
Igishushanyo nogukora
12 inch Fab yatanzwe kugirango igenzure imikorere nyayo, itanga kuvugurura no gusana, no kugenzura iterambere nigishushanyo.
Hamwe nibikoresho bitunganyirizwa hamwe nogutezimbere ikoranabuhanga rya semiconductor hamwe numuzunguruko uhuriweho, chucks gakondo ya electrostatike ikoresha ibikoresho bya polymer organic, okiside yicyuma nibikoresho bya ceramic nka dielectrics ntabwo bihuye neza nibikoresho nka wafer ya silicon, safiro na karubide ya silicon. Kubwibyo, amashanyarazi ya electrostatike ahujwe nicyiciro cya mbere, icya kabiri nicyagatatu igice cya semiconductor wafer grippers izatera imbere buhoro buhoro.
Polymer Electrostatic Chuck / Ubushyuhe
Ibikoresho bya polymer dielectric (Polymer) kuri ubu nibikoresho bikoreshwa cyane muri electrostatike chuck, inzira yo kuyitegura nayo ni ibikoresho bikuze cyane, polymer dielectric nyuma yo kuvura polymer, amashanyarazi, ubukanishi, kurwanya ubushyuhe, imitekerereze ya halogene izanozwa cyane. Ibikoresho bya dielectric byashushanyijeho nibindi bikorwa byahujwe, hanyuma bigashyirwa kumurongo wa vacuum umutwaro uremereye, hanyuma igashyirwaho ryinshi rya dielectric insulation hagati ya electrode y'imbere.
Polymer Electrostatic Chuck
Tekinoroji yo guhindura polymer ikoreshwa kugirango igere ku bwinshi kandi irwanya dielectric ihoraho, kandi ibone imbaraga zihamye.
Ibikoresho byinshi bya dielectric birashobora kugabanya ibyago byibintu kandi bikagabanya umuvuduko wa ion.
Ubwinshi bwibintu bifatanye birashobora guhuzwa no gufatira wafer yibikoresho bitandukanye.
Kurwanya ruswa nziza cyane muri halogen na plasma.
Imikorere ihenze cyane, igihe gito cyo kwemererwa, ibereye iterambere ryibicuruzwa no kugenzura ibikoresho bishya.
Polymer Electrostatic Chuck hamwe na Heater
Irashobora kumenya imiterere yubushyuhe bwinshi (kugeza kuri 20 zubushyuhe), kandi ifite ubushyuhe bwiza (± 5% ℃ @ 150 ℃).
Ikoranabuhanga rya Vacuum rikoreshwa mu kugera ku bucucike bukabije n'ubushyuhe bugera kuri 200 ° C.
Gushyushya icyarimwe, hamwe nubunini bwagutse bwubushyuhe Igenamiterere.
Imikorere ihenze cyane, igihe gito cyo kwemererwa, ibereye iterambere ryibicuruzwa no kugenzura ibikoresho bishya.
Ceramics Electrostatic Chuck / Ubushyuhe
Tekinoroji ya Ceramic ni uburyo bunoze bwo gucumura mugutezimbere alumina / aluminium nitride ceramic electrostatic chucks na hoteri. Intangiriro yacyo ni ugukoresha nanometero zitandukanye za diameter ya ceramic ifu, ivangwa mukigero runaka binyuze mubikoresho bidasanzwe byo kuvanga no kuvanga. Ceramic electrostatic chucks ifite ubucucike bwinshi, imiterere ihamye ya kirisiti hamwe nogukwirakwiza kimwe hamwe byashizwemo hamwe nubushuhe bwubushyuhe bukabije mubikoresho byo gucumura. Chuck static yakozwe na tekinoroji ya ceramic coagulation ifite ubucucike bwinshi, imiterere ihamye ya kirisiti hamwe nogukwirakwiza kwinshi kwinshi, kandi irashobora kumenya imikorere isanzwe yo gufatira chip mubidukikije bikabije munsi ya vacuum, plasma na halogene.
Al₂O₃ Amashanyarazi
Ingano yo kurwanya amajwi igenzurwa na tekinoroji ya ceramic tekinoroji hamwe no gufatanya kurasa kugirango ubone imbaraga ndende.
Imiterere yimbere yubushyuhe bwo hejuru irakabije kandi imiterere ya kristu irahagaze, kandi ubushobozi bwo gufata intera nini irashobora kuboneka.
Kwishyira hamwe gufatanya kugabanya kugabanya iyimuka rya ion.
Igikorwa kirambye muri plasma halogen vacuum ikirere.
AlN Electrostatic Chuck
Mugucunga ibice hamwe nuburinganire bwibintu bifatika, kurwanya amajwi birashobora kugenzurwa kandi ubushobozi bwo gufata intera nini irashobora kuboneka.
Ikwirakwizwa ry’ubushyuhe bumwe ryemezwa nubuhanga bwo gucumura hamwe no gufatanya kurasa kubutaka.
Kwishyira hamwe gufatanya gushushanya kugirango ibicuruzwa byuzuzwe neza.
Igikorwa kirambye muri plasma halogen vacuum ikirere.
Ceramics Electrostatic Chuck hamwe na Heater
Irashobora kumenya imiterere yubushyuhe bwinshi, kandi ifite ubushyuhe bwiza (±7.5%℃@350℃).
Ikoreshwa rya Vacuum laminating sintering ikoreshwa kugirango igere cyane kandi ubushyuhe bugere kuri 550 ℃.
Kwishyira hamwe gufatanya gushushanya kugirango ibicuruzwa byuzuzwe neza.
Igikorwa kirambye muri plasma halogen vacuum ikirere.
Ubwoko bugoye bwa Electrostatic Chuck / Ubushyuhe
Irashobora guhuzwa na silicon, gallium arsenide, carbide ya silicon, safiro yo gufunga wafer, irashobora kugabanya ibiciro byo guhindura insinga zabakora ibikoresho nabakoresha amaherezo. Hashingiwe ku buhanga bwa ceramic tekinoroji hamwe na tekinoroji yo guhindura polymer, gukoresha ikoreshwa rya vacuum lamination hamwe na tekinoroji ishyushye irashobora kugabanya ubushyuhe bwimbere bwumuriro wa electrostatike, kugera kubushyuhe bwimbere, gukora igipimo cyinshi cya dielectric insulation kugirango tunoze imikorere yimikorere ya ion.
Ubwoko bukomeye bwa Electrostatic Chuck
Ikoreshwa rya tekinoroji ya ceramic na polymer yo guhindura, ifite imiterere yuzuye kandi irekura gaze.
Kugenzura cyane igipimo cya dielectric hamwe nubunini bwa banki ya electrode.
Ubwinshi bwibintu bifatanye birashobora guhuzwa no gufatira wafer zitandukanye.
Kurwanya umubiri birashobora kugenzurwa neza kugirango ubone imbaraga zikomeye zo gufata amashanyarazi.
Imikorere ihenze cyane, igihe gito cyo kwemererwa, ibereye iterambere ryibicuruzwa no kugenzura ibikoresho bishya.
Ubwoko bugoye bwa Electrostatic Chuck hamwe na Heater
Irashobora kumenya imiterere yubushyuhe bwinshi, kandi ifite ubushyuhe bwiza (±3.5%℃@150℃).
Ikoranabuhanga rya Vacuum rikoreshwa mu kugera ku bucucike bukabije n'ubushyuhe bugera kuri 200 ° C.
Gushyushya icyarimwe, hamwe nubunini bwagutse bwubushyuhe Igenamiterere.
Imikorere ihenze cyane, igihe gito cyo kwemererwa, ibereye iterambere ryibicuruzwa no kugenzura ibikoresho bishya.