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Microporous Ceramic Vacuum Chuck
Ceramic vacuum chuck ibiranga
Kwinjira gukomeye: guhumeka ikirere kimwe no gutwarwa n’amazi, kugirango habeho imbaraga imwe hamwe no kwinjiza cyane wafer ya silicon mugusya nta kunyerera.
Imiterere yuzuye kandi imwe: Kwemeza ibikoresho bya ceramic micro-porous ceramic hamwe nuburinganire bwuzuye kandi bumwe, ntabwo byoroshye guhuza adsorb ivumbi rya silicon, kandi igikoma kiroroshye gusukurwa.
Imbaraga nyinshi: nta guhindagurika mugihe cyo gusya, kugirango umenye neza ko wafer ya silicon ishimangirwa kuri buri mwanya mugihe cyo gusya, kandi ntabwo byoroshye kubaho ibintu byo gusenyuka, imyanda.
Ubuzima burebure: kugumana imiterere yubuso ni byiza, imyambarire yo kwambara ni ndende kandi imyambarire ni nto, bityo ifite ubuzima burebure.
Kwambara byoroshye: ntihazabaho guturika, gucamo ibice, gukubita ibintu mugihe wambaye.
Umucyo woroshye: Bitewe n'imiterere y'imbere ya pore, coefficente yihariye ya rukuruzi ni 1.6-2.8.
Kwirinda cyane: kubika ibikoresho, gukuraho amashanyarazi ahamye.
Kugenzura Ukuri
| icyiciro | Ibikoresho shingiro | Ibikoresho byo hejuru | Ingano | Kubeshya | ubujyakuzimu |
| Urwenya | Aluminiyumu | SIC | ≤12μm | ≤15μm | ≤20μm |
| Ibyuma | ≤10μm | ≤15μm | |||
| Alumina | ≤5μm | ≤8μm | |||
| Silicon Carbide | ≤3μm | ≤8μm | |||
| Chuck ceramic chuck ifite urutonde rwuzuye rwerekana ubunini nubunini, bushobora gukoreshwa kumurongo wa santimetero 3, umurongo wa 4, umurongo wa 5, umurongo wa 6, umurongo wa 8, umurongo wa 8 na 12 Irashobora guhindurwa ukurikije ibisobanuro nubunini ukeneye. | |||||
| Ingano ntarengwa yuru rubanza ni: 1600 * 1600m, uburebure ni 50mm; | |||||
Ibintu byiza bya ceramic biranga:
Ibyingenzi byingenzi: alumina Ibara: umukara, icyatsi
Ibirimo bya Alumina: 92% Ibirungo: 0%
Aperture: 2 ~ 30um Ububabare: 35 ~ 40%
Imbaraga zunama: 6kgf / cm2 (Mpa) Umubare w'ijwi: 2.28g / cm3
Ubwoko bwa Ceramic
Ukurikije imikoreshereze, Ceramic chuck igabanyijemo:
Imashini yoroheje ifite ibikoresho: abrasive disc chuck, silicon wafer, substrate substrate nibindi kunanuka;
Imashini yo gutema ifite ibikoresho: kwandika chuck, silicon wafer, semiconductor compound wafer nibindi gukata;
Imashini isukura ifite ibikoresho: gusukura chuck;
Imashini ikuraho firime ifite ibikoresho: gukuramo firime chuck;
Imashini yamurika ifite ibikoresho: laminating chuck;
Imashini yo gucapa ifite ibikoresho: gucapa chuck.
Ubwishingizi bufite ireme
Fountyl ifite uburambe bwimyaka myinshi mubuhanga bwa ceramic precision na ultra-precision gutunganya no gukora, ibikoresho bitandukanye byo gusesengura umubiri na chimique nibikoresho byo gupima geometrike, kugirango habeho ituze ryumusaruro hamwe nibicuruzwa bikomoka kuri ceramic chuck.
Gusaba ibicuruzwa
Chuck chous (ameza y'akazi ya adsorption) nikintu gikoreshwa murwego rwo gukora igice cya kabiri kandi giteranirizwa kumashini yandika cyangwa igikoresho cyo kugenzura. Nibicuruzwa bishobora gukoresha imiterere nini hamwe numuvuduko mubi wubuso bwakazi kugirango ugumane silikoni yoroheje. Imashini yandika ikata wafer ya silicon hamwe nubugari bwa metero 20, bityo rero ibisabwa kugirango uburinganire nuburinganire bwa wafer adsorption hejuru cyane. Ukurikije imiterere yabyo, imiterere ya pore itandukanye ifite intera zitandukanye zikoreshwa, nka ceramics ya microporome ifite ubuso bunini bwihariye nubunini buto bwa pore, ubusanzwe bikoreshwa mugushungura kwa bagiteri no mumirima ikosora mikorobe; Mesoporous ceramics hamwe no gukwirakwiza diameter yihariye ikoreshwa mugutandukana, adsorption catalizike. Ubukorikori bwa Macroporome busanzwe bukwiranye no kuyungurura ibintu birimo ibintu byinshi kandi binini.