Ala fa'atafafa ma ta'iala mo le fa'atūlagaga fa'ata'ita'i ma mea faigaluega e iloa ai

O le avea o se faʻataʻitaʻiga o le faʻapotopotoga vacuum chuck, o mea na faʻaaogaina i le amataga o le 2 inisi ma le 4 inch wafer era o le alumini vaalele, ae na faʻafeiloaʻi i le fagu o le ultra-high flatness (sili atu nai lo le 1 micron) i le vaitau o le tele-tele. wafers (8 "ma sili atu i le 8"), lea e le mafai ona fetaui ma le faʻamaufaʻailoga faigata o le ultra-maualuga mafolafola ma faʻaumatia. Soso'o, alumina mea e pei o se suiga, lona modulus elastic, mamafa mama, conductivity vevela ma le faʻalauteleina faʻatasi ma silicon carbide dwarf, ae le o luga o nisi maasiasi; Ina ua mae'a le lavelave i le tekinolosi sauniuniga o le tele-tele ma lavelave fa'apitoa-foliga fa'a'ofu'ofu o'o'o sima carbide ceramics, vaega e aofia ai ultra-saʻo le faavae workpiece, ultra-saʻo taʻiala opeopea ea, ma wafer feaveai lima ua faaleleia.

E le gata o le silicon carbide ceramic vaega o loʻo taʻua i luga e fetaui ma faʻamaoniga faigata ultra-maualuga i luga o le mafolafola, parallelism, ma le verticality, mo le maualuga-mama silicon carbide ceramic vaega e manaʻomia mo le faʻasalalauina, doping, etching process i le semiconductor industry , aemaise lava i le maualuga-mama CVDSiC mea tekinolosi sauniuniga, ei ai se tekinolosi faagasologa matua, ma ua iloa le gaosiga o le maualuga-mama silicon carbide sima va'a tioata, silicon carbide ceramic tauaveina ipu, silicon carbide ceramic ea feʻaveaʻi tulaga faavae, silicon carbide ultra. -fa'atonuga fe'avea'i tulaga, alavai ta'iala fa'amea fa'asolo, mea fa'ase'e fa'ase'e fa'ameamea.

I le lumanaʻi, o le a faʻalauteleina le faʻaogaina o mea faʻapipiʻi silicon carbide i totonu o le semiconductor industry ma saofagā i le faʻaleleia o le semiconductor industry chain ma le silicon carbide ceramic industry. O Saina sa'o silicon carbide ceramic vaega suʻesuʻe tutoatasi ma le faʻalauiloaina o talosaga i totonu o le atunuʻu ua faatoa amata, faatasi ai ma le atinaʻeina malosi o alamanuia semiconductor, o le manaʻoga maketi mo lenei ituaiga fausaga sima maualuga o le a sili atu ma sili atu, silicon carbide ma lona tino lelei ma mea tau vailaau, i totonu o le semiconductor alamanuia o loʻo i ai faʻamoemoega faʻaoga lautele.