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Wafer pine chuck fa'aaogaina mo masini fa'aalia semiconductor ma masini su'esu'e wafer
Vaega
Tete'e o le vevela maualuga:Silicon carbide ma alumina ceramic mea e sili ona lelei le maualuga o le vevela, e mafai ona faʻaaogaina i le vevela vevela mo se taimi umi, e le faigofie ona faʻaleagaina poʻo gau.
Tete'e a'e:e mafai ona tatalia le tele o vailaʻau faʻamaʻi, talafeagai mo le faʻaogaina o sua sua poʻo gas i totonu o le siosiomaga faigaluega.
La'ei tetee:maualuga maaa, faʻatasi ai ma le lelei o le ofuina, e mafai ona faʻaaogaina mo se taimi umi e aunoa ma se toilalo.
Malosi le adsorption:o le faʻailoga faʻapipiʻi faʻaititia le vaega faʻafesoʻotaʻi o le ipu suction, ma faʻapupulaina ai le malosi o le adsorption i le iunite, ma e mafai ona sili atu ona faʻapipiʻi le mea faigaluega.
Maumau maualuga:Ona o uiga o mea, o le wafer pine chuck e maualuga le mautu ma e mafai ona galue mausali mo se taimi umi.
Fa'aitiitia le filogia:O lo'o fa'asolo a'e mai fa'ato'aga i pine e fa'aitiitia ai le vaega e fa'afeso'ota'i ai, fa'aitiitia ai le fa'aleagaina ma fa'aleleia le fa'asa'oga.
Puleaina o Fa'agasologa
Saʻo maualuga: 12 inisi le lautele, mafolafola e pulea i totonu ole 5 μm; Afai e te manaʻomia le faʻamaonia atili, faʻamolemole imeli mai ia i matou.
Puleaina o foliga: Fetuuna'i le foliga o le chuck e tusa ai ma foliga o le wafer (pulea e le tutusa).
Fa'asa'o fa'afofoga: Fa'ailoga fa'apitoa e tusa ai ma fa'amatalaga.
La Tatou Auaunaga
O le filifilia o le paʻu o le wafer pine e tatau ona mafaufauina e tusa ai ma le tele o mea e pei o le lautele manaʻomia o ipu suction, numera o mea faʻafefete, ma foliga o le chuck, ma faia se filifiliga talafeagai e tusa ai ma le tele, mamafa o le adsorption. mea ma manaoga o le siosiomaga faigaluega.
Na matou faʻaaogaina tekinolosi faʻapipiʻi mafolafola saʻo, faʻatino mamanu faʻapitoa mo aganuʻu, ma tuʻuina atu le pine faʻapipiʻi sili ona lelei e faʻafetaui ai manaʻoga mamafa o tagata faʻatau.
Le foliga mafolafola o le pine chuck e mafai ona saoloto fetuunai e tusa ai ma foliga o le wafer, ma le nofoaga adsorption po o pine pine e mafai ona faʻavasegaina e faʻaleleia ai le tali atu o le adsorption.
Mea: Alumini oxide ceramic poʻo carbide silicon e mafai ona filifilia, ma DLC ma Teflon e mafai ona faʻapipiʻi i luga.
O lo'o fa'atupuina fa'amauga fa'amau fa'ama'i SiC/SSiC mo le fa'aaliaina o fa'ama'i, su'esu'ega, felauaiga fa'agasolo e matua'i fetu'una'i, matua mafolafola, ma e matua fa'asao i siosiomaga faigaluega faigata.
Fa'amatalaga Sa'o o Su'ega
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![sdw (3) pwr](https://ecdn6.globalso.com/upload/p/277/image_other/2024-01/6597c7c404fe578289.jpg)
![0af19965-9b3b-4d8d-b343-2a7da016f7d7(1)84c](https://ecdn6.globalso.com/upload/p/277/image_other/2024-01/6597d73dc695f48825.jpg)
Fa'atatauga
Fa'apipi'iina o le masini fa'aalia semiconductor; Fa'amauga fa'amasani ole masini su'esu'e.