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Electrostatic chuck ine kuenderana, yakakwira-density, yakakwira simba rechimiro neyakagadzirirwa
Features
Kugarisana | Customization | High-Density | High Structural Strength | Yekukurumidza Yekutumira Nguva | Mari-inoshanda
Applications
Lon-implantation | Thin Film | Etch | Process Development | Equipment Design
Dhizaini uye Kugadzira
12 inch Fab inounzwa kuti ione kuita chaiko, kupa kuvandudzwa uye kugadzirisa, uye kuona budiriro uye dhizaini.
Iine michina yekugadzira uye process tekinoroji kusimudzira semiconductor uye yakabatanidzwa dunhu, iyo yechinyakare electrostatic chucks inoshandisa organic polymer zvinhu, simbi oxides uye ceramic zvinhu se dielectrics hazvienderane zvizere nezvinhu zvakadai sesilicon wafers, safiro uye silicon carbide. Naizvozvo, electrostatic chucks inoenderana neyekutanga, yechipiri uye yechitatu chizvarwa semiconductor wafer grippers inokura zvishoma nezvishoma.
Polymer Electrostatic Chuck / Heater
Polymer dielectric zvinhu (Polymer) parizvino ndiyo inonyanya kushandiswa electrostatic chuck zvinhu, maitiro ayo ekugadzirisa zvakare akanyanya kukura, polymer dielectric zvinhu mushure mekugadziriswa kwepolymer kurapwa, magetsi, mechanic, kuramba tembiricha, halogen kuramba zvivakwa zvichavandudzwa zvakanyanya. Iyo dielectric zvinhu inofananidzwa nemamwe mashandisirwo akabatanidzwa, uyezve akaturikidzana neakawanda nhanho vacuum inorema mutoro, uye dense dielectric insulation layer inoumbwa pakati pemagetsi emukati.
Polymer Electrostatic Chuck
Iyo polymer shanduko tekinoroji inoshandiswa kuwana yakakwira yakawanda resistivity uye hama dielectric nguva dzose, uye kuwana yakawedzera kugadzikana clamping simba.
Yakakwira density dielectric zvinhu zvinogona kuderedza njodzi yechinhu chechikamu uye kuderedza ion kufamba.
Kusiyana kwezvinhu zvinosungirirana zvinogona kuenderana nekusungirirwa kwewafers emhando dzakasiyana.
Yakanakisa corrosion kuramba mu halogen uye plasma atmospheres.
Kushanda kwemutengo wepamusoro, nguva pfupi yekugamuchirwa, yakakodzera kugadzirwa kwechigadzirwa uye kusimbiswa kwemidziyo mitsva.
Polymer Electrostatic Chuck Ine Heater
Inogona kuona kurongeka kwenzvimbo dzakawanda dzekudziya tembiricha (kusvika makumi maviri etembiricha nzvimbo), uye ine yakanaka yekudziya tembiricha kufanana (± 5% ℃@150 ℃).
Vacuum laminating tekinoroji inoshandiswa kuwana yakanyanyisa density uye tembiricha yekudziya kusvika ku200 ° C.
Uniform heat curve, ine huwandu hwakakura hwetembiricha curve Settings.
Kushanda kwemutengo wepamusoro, nguva pfupi yekugamuchirwa, yakakodzera kugadzirwa kwechigadzirwa uye kusimbiswa kwemidziyo mitsva.
Ceramics Electrostatic Chuck / Heater
Ceramic coagulation tekinoroji ndeye yakagadziridzwa sintering process mukuvandudza kwealumina/aluminum nitride ceramic electrostatic chucks uye heaters. Yayo musimboti ndeye kushandisa akasiyana nanometer dhayamita ceramic poda, iyo yakasanganiswa mune imwe chikamu kuburikidza yakasarudzika yekusanganisa michina uye kusanganisa maitiro. Ceramic electrostatic chucks ine high density, yakagadzika crystal chimiro uye yunifomu resistivity kugovera yakasiiwa neimwe sintering tembiricha curve mune sintering michina. Iyo static chuck inogadzirwa neceramic coagulation tekinoroji ine yakakwira density, yakagadzika kristaro chimiro uye yunifomu vhoriyamu resistivity kugovera, uye inogona kuona yakajairika clamping basa re chip munzvimbo ine hutsinye pasi pepamusoro vacuum, plasma uye halogen.
Al₂O₃ Electrostatic Chuck
Iyo vhoriyamu resistivity inodzorwa necoagulation ceramic tekinoroji uye co-firing process kuti iwane refu kubata simba.
Iyo yemukati chimiro chepamusoro tembiricha sintering yakaomeswa uye chimiro chekristaro chakagadzikana, uye simba rekubata reiyo tembiricha yakakura inogona kuwanikwa.
Integrated co-firing molding inoderedza ion migration.
Kushanda kwenguva refu muplasma halogen vacuum atmosphere.
AlN Electrostatic Chuck
Nekudzora kuumbwa uye chikamu cheiyo kongiri zvinhu, iyo vhoriyamu resistivity inogona kudzorwa uye iyo yekubata simba mune yakakura tembiricha yepakati inogona kuwanikwa.
Iyo yunifomu tembiricha yekugovera nzvimbo inosimbiswa neiyo sintering tekinoroji uye co-firing process yekongiri ceramics.
Yakabatanidzwa co-firing molding kuti iwedzere kunaka kwechigadzirwa.
Kushanda kwenguva refu muplasma halogen vacuum atmosphere.
Ceramics Electrostatic Chuck Ine Heater
Inogona kuona kurongeka kwenzvimbo dzakawanda dzekudziya tembiricha, uye ine yakanaka yekupisa tembiricha kufanana (± 7.5% ℃@350 ℃).
Vacuum laminating sintering tekinoroji inoshandiswa kuwana yakanyanyisa densification uye tembiricha yekudziya inosvika 550 ℃.
Yakabatanidzwa co-firing molding kuti iwedzere kunaka kwechigadzirwa.
Kushanda kwenguva refu muplasma halogen vacuum atmosphere.
Complex Type Electrostatic Chuck / Heater
Inogona kuenderana nesilicon, gallium arsenide, silicon carbide, sapphire yewafer clamping, inogona kuderedza mutengo wekuchinja waya yevagadziri vemidziyo uye vashandisi vekupedzisira. Zvichienderana nekongiri ye ceramic tekinoroji uye tekinoroji yepolymer shanduko, kushandiswa kweiyo yakasanganiswa vacuum lamination uye inopisa bonding tekinoroji inogona kudzikisa kupisa kwemukati kweye electrostatic sucker, kuwana yemukati tembiricha kufanana, kuumba dense dielectric insulation layer yekuvandudza ion migration kuramba kuita.
Complex Type Electrostatic Chuck
Iko kushandiswa kwekongiri ceramic uye polymer shanduko tekinoroji, ine yakakwira dense chimiro uye yakaderera gasi kuburitswa.
Kudzora kwakasimba kwe dielectric layer uye electrode bank ukobvu.
Musiyano wezvinhu zvekusunga zvinogona kuenderana nekusungirirwa kweakasiyana wafers.
Iyo resistivity yemuviri inogona kudzorwa nenzira kwayo kuti iwane yakasimba electrostatic holding capacity.
Kushanda kwemutengo wepamusoro, nguva pfupi yekugamuchirwa, yakakodzera kugadzirwa kwechigadzirwa uye kusimbiswa kwemidziyo mitsva.
Complex Type Electrostatic Chuck Ine Heater
Inogona kuona dhizaini yenzvimbo dzakawanda dzekupisa tembiricha, uye ine yakanaka yekudziya tembiricha kufanana (± 3.5% ℃@150 ℃).
Vacuum laminating tekinoroji inoshandiswa kuwana yakanyanyisa density uye tembiricha yekudziya kusvika ku200 ° C.
Uniform heat curve, ine huwandu hwakakura hwetembiricha curve Settings.
Kuita kwemutengo wepamusoro, nguva pfupi yekugamuchirwa, yakakodzera kugadzirwa kwechigadzirwa uye kusimbiswa kwemidziyo mitsva.