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Porous mhepo inoyangarara papuratifomu ine tekinoroji yekutamisa tekinoroji yeasiri-yekubata modhi ye semiconductor indasitiri
Iyo yechinyakare mhepo inoyangarara chikuva inowanzo tora diki gomba throttling, torus throttling kana slit throttling tekinoroji, iyo inoratidzwa neyakapfava yekugadzira tekinoroji, asi kana mweya wekupa mweya wachinja, zviri nyore kuburitsa chiitiko chekuridza muridzo, ruzha rwakapinza, uye kutakura. simba zvakare rinochinja-chinja, izvo zvisina kukodzera kunyarara uye kugadzikana kumanikidza kushanda nharaunda.
Traditional TFT-LCD girazi substrates inoitwa nemarobhoti maoko (Robots) uye AGV (Automated inotungamirwa mota) masisitimu. Girazi substrate mukugadzira maitiro. Iko kushanda kwekubata neiyo mutoro wekuchinja chikuva (kana roller). Kana iyo girazi substrate yasangana neinoremerwa chikuva kana roller, kubata uye kukakavara kunokonzeresa uku kukuvadza kana kukanganisa matambudziko emakona akashaikwa, kuputika, kukuvadzwa, kusvibiswa, uye static magetsi pamusoro pegirazi substrate, zvobva zvakanganisa kugadzirwa. goho uye mhando yechigadzirwa, kunze kwekushandisa roller kutenderera kutamisa mutoro, uchine matambudziko ehunyanzvi ekukunda. Aya matambudziko ane chekuita kwakadzama pakubudirira kwekugadzira kweakakura-saizi girazi substrates uye ari kudiwa nekukurumidza kuti avandudzwe. Kana iyo isingabatanidzi mhepo inoyangarara pachikuva tekinoroji inogona kutsiva matambudziko anobva kune yechinyakare kuonana mutoro wekuchinja tekinoroji, ichava mhinduro inoshanda. Zvakanakira Zvemhepo Inoyangarara System:
1. Zero friction.
2. Zero kupfeka.
3. Kufamba kwakatwasuka, Kutenderera kwekufamba kunoshanda.
4. Kunyarara uye kushanda zvakanaka.
5. Kunyorova kwepamusoro.
6. Bvisa mafuta.
Chimiro chepuratifomu inoyangarara mhepo inoumbwa nenano-porous ceramics yakaiswa munheyo kuita imba yekutsvaira. mhepo yakachena yakamanikidzwa ine mvura-isina uye isina-oiri inopinza mumhepo modhi gap pakati peinotakura pamusoro uye mhepo inoyangarara inotungamira njanji kuburikidza nepombi yegesi. Iyo gasi inoyerera mumhepo modhi gap kuita kuti inotakura nzvimbo iyangamire pamhepo inoyangarara njanji. Gasi rinoshanda semafuta ekufambisa kana kutakura zvinhu pasina kukweshana.
Kuvakwa kwegomba rinoyangarara remhepo rakajairwa:
a) Orifice throttling chimiro
b) Porous chimiro
Iyo yakakura yakagadziriswa saizi: kureba 1600mm, hupamhi 1000mm
Zvisiri-contact kuburitsa uye mutoro wekuchinja midziyo inonyanya kuvandudza matambudziko anokonzerwa nehunyanzvi hwekubata tekinoroji mushure mekunge girasi substrate yave yakakura, nekuti mukutakura uye kuchinjika kwemutoro haisi kutarisana zvakananga nechinhu chekushanda, saka inogona kudzivirira kuitika. yezvinosvibisa zvakanamatira, kushushikana, static magetsi uye kukuvadzwa kwegirazi substrate. Porous material, kune rumwe rutivi, inoderedza zvakanyanya kuyerera kwegasi, inowana yunifomu yemhepo yekumanikidza uye kugovera kwakanaka kwemhepo cushion, uye inopa hurefu hwakakwana hwekuyangarara hunodiwa kuti ushande.