Guriga
Alaabta ugu muhiimsan
vacuum Chuck dhoobada yar yar
Astaamaha vacuum vacuum chuck
Dareemidda xooggan: dabar-goynta hawada isku midka ah iyo qulqulka biyaha, si loo hubiyo xoogga isku midka ah iyo si adag u xayeysiinta wafer silikoon ee habka wax lagu shiidi karo iyada oo aan la jiidin.
Qaab dhismeedka cufan iyo lebbiska: Qaadashada walxaha dhoobada yar-yar ee leh qaab-dhismeedka cufan iyo lebbiska, taas oo aan sahlanayn in lagu dhajiyo boodhka silikon, iyo chuck waa sahlan tahay in la nadiifiyo.
Xoogga sare: ma qallafsanaan inta lagu guda jiro shiida, si loo hubiyo in maraqa silikoon waxaa si siman u cadaadisay meel kasta marka shiidi, oo ma fududa in ay dhacaan ifafaale burburka cidhifka, qashinka.
Nolosha dheer: haynta qaabka dusha sare waa mid wanaagsan, wareegga dhar-xidhashadu waa dheer yahay, qadarka dhar-xidhashaduna waa yar yahay, sidaas darteed waxay leedahay nolol sare.
Labbis fudud: ma jiri doonto dildilaac, jajab, ifafaale wax lagu tumo marka la xidho.
Miisaanka Fudud: Iyadoo ay ugu wacan tahay qaabka gudaha ee daldaloolada, isugeynta gaarka ah waa 1.6-2.8.
Dahaarka sare: walxaha dahaarka, baabi'inta korantada taagan.
Xakamaynta saxda ah
| qaybta | Qalabka saldhigga ah | Walxaha dusha sare ee adsorption | Cabbirka | Fiican | qoto dheer ee isbarbardhigga |
| Jeex dalool ah | Aluminium Aloy | SIC dalool | ≤12μm | ≤15μm | ≤20μm |
| Bir daxal laheyn | ≤10μm | ≤15μm | |||
| Alumina | ≤5μm | ≤8μm | |||
| Silicon Carbide | ≤3μm | ≤8μm | |||
| Qulqulka dhoobada dhoobada leh ayaa leh noocyo iyo cabbirro dhammaystiran, kuwaas oo loo isticmaali karo xariiqda 3-inch, 4-inch line, 5-inch line, 6-line line, 8-inch line and 12-inch line, iyo waxaa lagu habeyn karaa iyadoo loo eegayo qeexida iyo cabbirrada aad u baahan tahay. | |||||
| Cabbirka ugu badan ee kiiska hadda jira waa: 1600*1600m, dhumucdiisuna waa 50mm; | |||||
Tilmaamaha walxaha dhoobada ah ee daloola:
Maaddooyinka ugu muhiimsan: alumina Midabka: madow, cawl bir ah
Waxa ku jira alumina: 92% ka kooban qoyaan: 0%
Aperture: 2 ~ 30um Porosity: 35 ~ 40%
Xoog laabashada: 6kgf/cm2 (Mpa) saamiga mugga: 2.28g/cm3
Nooca dhoobada dhoobada
Sida ku cad isticmaalka, dhoobada dhoobada ayaa loo qaybiyaa:
Mashiinka khafiifka ah ee ku qalabaysan: saxanka abrasive, wafer silicon, substrate sapphire iyo khafiifinta kale;
Mashiinka goynta waxaa lagu qalabeeyaa: chuck-qorista, wafer silikoon, wafer-ka kooban semiconductor iyo jarista kale;
Mashiinka nadiifinta ee ku qalabaysan: nadiifinta nadiifinta;
Mashiinka saarista filimku wuxuu ku qalabaysan yahay: jilitaanka filimka;
Mashiinka wax lagu dhejiyo ee lagu qalabeeyay: chuck laminating;
Mashiinka daabacaadda oo ku qalabaysan: chuck printing.
Hubinta tayada
Fountyl waxay leedahay sanado badan oo waayo-aragnimo farsamo ah oo ku saabsan saxnaanta injineernimada iyo saxnaanta ultra- saxnaanta iyo wax soo saarka, noocyo kala duwan oo qalab falanqeyn jireed iyo kiimiko ah iyo qalabka cabbiraadda joomatari, si loo hubiyo xasilloonida wax soo saarka iyo joogtaynta badeecada loogu talagalay dhoobada dhoobada.
Codsiga Alaabta
Qulqulka daloosha (miiska shaqada xayeysiinta) waa qayb loo isticmaalo heerka wax-soo-saarka semiconductor oo lagu ururiyay mishiinka wax lagu qoro ama qalabka kormeerka. Waa badeecad isticmaali karta qaab dhismeedka daloolka leh iyo cadaadiska taban ee dusha sare ee kursiga shaqada si loo ilaaliyo maraqa silikoon khafiif ah oo siman. Mashiinka wax lagu qoro wuxuu gooyaa waferka silikoonka oo ballaciisu yahay 20μm, sidaa darteed shuruudaha loo baahan yahay si siman iyo isbarbardhigga dusha sare ee wafer-ka ayaa aad u sarreeya. Marka loo eego sifooyinkooda, qaababka kala duwan ee daloolku waxay leeyihiin kala duwanaansho codsi oo kala duwan, sida ceramics microporous oo leh meel sare oo gaar ah iyo cabbir yar oo dalool ah, oo badanaa loo isticmaalo sifeynta bakteeriyada iyo beeraha hagaajinta microbial; Ceramics Mesoporous oo leh qaybinta dhexroorkooda gaarka ah ayaa inta badan loo adeegsadaa kala soocida, beeraha catalysis adsorption. ceramics Macroporous caadi ahaan ku haboon sifaynta qallafsan ee walxaha leh nuxur weyn iyo cabbir weyn.