Lehae
Lihlahisoa
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Electrostatic chuck e tsamaellanang, boima bo phahameng, matla a sebopeho se phahameng ka mokhoa o ikhethileng.
Likaroloana
Tšebelisano | Customization | Boima bo Holimo | Matla a Phahameng a Mehaho | Nako ea Phano e potlakileng | E boloka chelete
Lisebelisoa
Lon-implantation | Thin Film | Etse | Nts'etsopele ea Ts'ebetso | Moqapi oa Lisebelisoa
Moralo le Tlhahiso
12 inch Fab e tlisoa ho netefatsa ts'ebetso ea 'nete, ho fana ka nchafatso le tokiso, le ho netefatsa nts'etsopele le moralo.
Ka lisebelisoa tsa ts'ebetso le nts'etsopele ea theknoloji ea semiconductor le potoloho e kopantsoeng, li-chucks tsa setso tsa motlakase tse sebelisang thepa ea polymer ea organic, li-oxide tsa tšepe le lisebelisoa tsa ceramic joalo ka dielectrics ha li tsamaellane ka botlalo le lisebelisoa tse kang liphaphatha tsa silicon, safire le silicon carbide. Ka hona, li-chucks tsa electrostatic tse lumellanang le moloko oa pele, oa bobeli le oa boraro oa li-semiconductor wafer grippers li tla ntlafala butle-butle.
Polymer Electrostatic Chuck / Heater
Polymer dielectric material (Polymer) hajoale ke lisebelisoa tse sebelisoang ka ho fetesisa tsa electrostatic chuck, ts'ebetso ea eona ea ho itokisa e boetse e le lisebelisoa tse holileng ka ho fetesisa, polymer dielectric kamora kalafo ea phetoho ea polymer, motlakase, mochini, ho hanyetsa mocheso, thepa ea ho hanyetsa halogen e tla ntlafatsoa haholo. Thepa ea dielectric e entsoe ka ts'ebetso e 'ngoe e kopantsoeng, ebe e aroloa ke moroalo o boima oa li-multistage vacuum,' me ho thehoa lesela le teteaneng la dielectric pakeng tsa li-electrode tse ka hare.
Polymer Electrostatic Chuck
Theknoloji ea phetoho ea polymer e sebelisetsoa ho fumana matla a mangata a ho hanyetsa le ho boloka dielectric kamehla, le ho fumana matla a tsitsitseng haholoanyane.
Lisebelisoa tse phahameng tsa dielectric li ka fokotsa kotsi ea lintho tse nyenyane le ho fokotsa ho tsamaea ha ion.
Mefuta e fapaneng ea lintho tse koalang e ka tsamaellana le ho koaloa ha li-wafers tsa lisebelisoa tse fapaneng.
Ho hanyetsa ho hoholo ha kutu maemong a halogen le plasma.
Ts'ebetso e phahameng ea litšenyehelo, nako e khuts'oane ea ho amoheloa, e loketseng ntlafatso ea ts'ebetso ea sehlahisoa le netefatso ea ntlafatso ea lisebelisoa tse ncha.
Polymer Electrostatic Chuck With Heater
E khona ho hlokomela tlhophiso ea libaka tse ngata tsa mocheso oa mocheso (ho fihla ho libaka tse 20 tsa mocheso), 'me e na le boemo bo botle ba mocheso oa mocheso (±5%℃@150℃).
Theknoloji ea vacuum laminating e sebelisoa ho fihlela sekhahla se phahameng haholo le mocheso o futhumatsang ho fihla ho 200 ° C.
Mokokotlo o ts'oanang oa ho futhumatsa, o nang le mefuta e mengata e fapaneng ea li-curve tsa mocheso.
Ts'ebetso e phahameng ea litšenyehelo, nako e khuts'oane ea ho amoheloa, e loketseng ntlafatso ea ts'ebetso ea sehlahisoa le netefatso ea ntlafatso ea lisebelisoa tse ncha.
Ceramics Electrostatic Chuck / Heater
Theknoloji ea Ceramic coagulation ke ts'ebetso e ntlafetseng ea sintering ho nts'etsopele ea alumina / aluminium nitride ceramic electrostatic chucks le heaters. Moko-taba oa eona ke ho sebelisa mefuta e fapaneng ea li-nanometer bophara ba li-powders tsa ceramic, tse kopantsoeng ka mokhoa o itseng ka mokhoa o ikhethileng oa ho kopanya le mokhoa oa ho kopanya. Ceramic electrostatic chucks le segokanyipalo se phahameng, sebopeho kristale tsitsitseng le junifomo resistivity kabo ba ne ba sintered le itseng sintering mocheso mothinya ka thepa sintering. The static chuck e entsoeng ke thekenoloji ea ceramic coagulation e na le sekhahla se phahameng, sebopeho sa kristale se tsitsitseng le phepelo e ts'oanang ea ho thibela molumo, 'me e khona ho lemoha mosebetsi o tloaelehileng oa ho koala ha chip tikolohong e thata tlas'a vacuum e phahameng, plasma le halogen.
Al₂O₃ Electrostatic Chuck
Molumo oa resistivity o laoloa ke theknoloji ea coagulation ceramic le co-firing process ho fumana matla a nako e telele a ho tšoara.
Sebopeho sa ka hare sa mocheso o phahameng oa sintering se teteaneng mme sebopeho sa kristale se tsitsitse, 'me matla a ho tšoara nako e kholoanyane ea mocheso a ka fumanoa.
Ho kopanya ho kopanya ho kopanya ho fokotsa ho falla ha ion.
Ts'ebetso e tšoarellang moeeng oa plasma halogen vacuum.
AlN Electrostatic Chuck
Ka ho laola ho hlophisoa le karolo ea thepa ea konkreite, ho hanyetsa molumo ho ka laoloa 'me matla a ho tšoara ka nako e kholoanyane ea mocheso o ka fumanoa.
Kabo e ts'oanang ea mocheso oa libaka e netefatsoa ke theknoloji ea sintering le ts'ebetso ea ho thunngoa ha lirafshoa tsa konkreite.
Ho kopanya ho kopanya ho kopanya ho holisa boleng ba sehlahisoa.
Ts'ebetso e tšoarellang moeeng oa plasma halogen vacuum.
Ceramics Electrostatic Chuck With Heater
E khona ho hlokomela sebopeho sa libaka tse ngata tsa mocheso oa mocheso, 'me e na le mocheso o motle oa ho futhumatsa mocheso (±7.5%℃@350℃).
Theknoloji ea "vacuum laminating sintering" e sebelisetsoa ho finyella tšubuhlellano e phahameng haholo le mocheso o futhumatsang ho fihla ho 550 ℃.
Ho kopanya ho kopanya ho kopanya ho holisa boleng ba sehlahisoa.
Ts'ebetso e tšoarellang moeeng oa plasma halogen vacuum.
Mofuta o rarahaneng oa Electrostatic Chuck / Heater
E ka lumellana le silicon, gallium arsenide, silicon carbide, sapphire of wafer clamping, e ka fokotsa litšenyehelo tsa phetoho ea terata ea baetsi ba lisebelisoa le basebelisi ba ho qetela. Ho ipapisitsoe le theknoloji ea konkreite ea ceramic le theknoloji ea phetoho ea polymer, ts'ebeliso ea "vacuum lamination" e kopantsoeng le theknoloji e chesang ea ho kopanya e ka fokotsa ho hanyetsa mocheso o ka hare oa motlakase oa motlakase, ho finyella mocheso o ka hare oa mocheso, ho theha lesela le teteaneng la dielectric ho ntlafatsa ts'ebetso ea ho hanyetsa ho falla ha ion.
Complex Type Electrostatic Chuck
Tšebeliso ea theknoloji ea phetoho ea konkreite ea ceramic le polymer, e na le sebopeho se phahameng se teteaneng le ho lokolloa ha khase e tlaase.
Taolo e matla ea lera la dielectric le botenya ba banka ea elektrode.
Mefuta e fapaneng ea lintho tse koalang e ka tsamaellana le ho koaloa ha li-wafers tse fapaneng.
The resistivity ea 'mele e ka laoloa ka nepo ho fumana matla a matla a ho tšoara electrostatic.
Ts'ebetso e phahameng ea litšenyehelo, nako e khuts'oane ea ho amoheloa, e loketseng ntlafatso ea ts'ebetso ea sehlahisoa le netefatso ea ntlafatso ea lisebelisoa tse ncha.
Complex Type Electrostatic Chuck With Heater
E khona ho hlokomela sebopeho sa libaka tse ngata tsa mocheso oa mocheso, 'me e na le mocheso o motle oa ho futhumatsa mocheso (±3.5%℃@150℃).
Theknoloji ea vacuum laminating e sebelisoa ho fihlela sekhahla se phahameng haholo le mocheso o futhumatsang ho fihla ho 200 ° C.
Mokokotlo o ts'oanang oa ho futhumatsa, o nang le mefuta e mengata e fapaneng ea li-curve tsa mocheso.
Ts'ebetso e phahameng ea litšenyehelo, nako e khuts'oane ea ho amoheloa, e loketseng ntlafatso ea ts'ebetso ea sehlahisoa le netefatso ea ntlafatso ea lisebelisoa tse ncha.