Square beam & guide rail for ultra-precision motion platform le lisebelisoa tsa ho lemoha

Ho nka mohlala oa kopano ea vacuum chuck, thepa e sebelisitsoeng mehleng ea khale ea 2 inch le 4 inch wafer ke aluminium ea sefofane, empa e kopane le botlolo ba ho bata haholo (ho feta 1 micron) mehleng ea boholo bo boholo. li-wafers (8 "le tse fetang 8"), tse ke keng tsa kopana le index e thata ea flatness e phahameng haholo 'me e felisoa. Ka mor'a moo, lisebelisoa tsa alumina e le phetoho, modulus ea eona ea elastic, boima bo bobebe, conductivity ea mocheso le coefficient ea katoloso le silicon carbide dwarf, empa eseng ka ntho e hlabisang lihlong; Kamora katleho ea theknoloji ea boitokiso ea lirafshoa tsa silicon carbide ceramics tse boholo bo boholo le tse rarahaneng tse nang le sebopeho se ikhethileng, likarolo tse kenyelletsang li-workpiece base li ntlafalitsoe ka ho fetesisa, tataiso e nepahetseng ea moea, le letsoho la phetisetso ea wafer li ntlafalitsoe.

Ha se feela likarolo tse boletsoeng ka holimo tsa silicon carbide ceramic tse kopanang le matšoao a thata ka ho fetesisa, ho ts'oana le ho otloloha, bakeng sa likarolo tse phahameng tsa silicon carbide ceramic tse hlokehang bakeng sa phallo ea sephaphatha, doping, lits'ebetso tsa ho kenya indastering ea semiconductor. , haholo-holo theknoloji ea ho lokisa thepa ea CVDSiC e hloekileng haholo, e na le theknoloji e hōlileng ka ho feletseng, 'me e hlokometse ho etsoa ha sekepe se phahameng sa silicon carbide ceramic crystal boat, silicon carbide ceramic bearing plate, silicon carbide ceramic air floating movement platform, silicon carbide ultra. -Sethala se tsamaeang hantle, seporo sa silicon carbide guide, silicon carbide slide rail components.

Nakong e tlang, re tla tsoela pele ho atolosa ts'ebeliso ea lisebelisoa tsa silicon carbide indastering ea semiconductor le ho kenya letsoho ntlafatsong ea ketane ea indasteri ea semiconductor le indasteri ea silicon carbide ceramic. Likarolo tse nepahetseng tsa China tsa silicon carbide ceramic likarolo tsa lipatlisiso tse ikemetseng le ts'ebetso ea ts'ebeliso ea lapeng e sa tsoa qala, ka nts'etsopele e matla ea indasteri ea semiconductor, tlhokahalo ea mmaraka ea mofuta ona oa sebopeho se phahameng sa ceramic e tla ba kholo le ho feta, silicon carbide e nang le 'mele o motle le oa eona. thepa ea lik'hemik'hale, indastering ea semiconductor e na le menyetla e pharaletseng ea kopo.