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Wafer pin chuck e sebelisetsoang sesebelisoa sa ho pepeseha ha semiconductor le sesebelisoa sa tlhahlobo ea wafer
Likaroloana
Ho hanyetsa mocheso o phahameng:Lisebelisoa tsa silicon carbide le alumina ceramic li na le ts'ebetso e ntle haholo ea mocheso o phahameng, li ka sebelisoa sebakeng sa mocheso o phahameng ka nako e telele, ha ho bonolo ho senyeha kapa ho robeha.
Corrosion resistance:e ka mamella mefuta e fapaneng ea kutu ea lik'hemik'hale, e loketseng ho sebetsana le maro a senyang kapa likhase sebakeng sa mosebetsi.
Rear resistance:boima bo phahameng, bo nang le khanyetso e ntle ea ho apara, bo ka sebelisoa nako e telele ntle le ho hlōleha.
Adsorption e matla:sebopeho sa ntlha ea convex se fokotsa sebaka sa ho kopana sa senoelo sa moheli, ka hona se eketsa matla a adsorption sebakeng se seng le se seng, 'me se ka tiisa mosebetsi oa ho sebetsa.
Botsitso bo phahameng:Ka lebaka la litšobotsi tsa thepa, "wafer pin chuck" e na le botsitso bo phahameng 'me e ka sebetsa ka mokhoa o tsitsitseng nako e telele.
Fokotsa tshilafalo:Li-chuck tsa ceramic li ntse li fetoha ho tloha ho li-grooves ho ea ho lithakhisa ho fokotsa sebaka sa ho kopana, ho fokotsa tšilafalo e itseng le ho ntlafatsa tokiso ea ntoa.
Taolo ea Ts'ebetso
Ho nepahala ho phahameng: bophara ba lisenthimithara tse 12, flatness e laoloa ka hare ho 5 μm; Haeba u hloka ho nepahala ho feta, ka kopo re romelle imeile.
Taolo ea sebopeho: Fetola sebopeho sa chuck ho latela sebopeho sa wafer (taolo e sa ts'oaneng).
Karabelo ea Absorptive: Moralo o ikhethileng ho latela litlhaloso.
Litšebeletso tsa Rōna
Khetho ea li-wafer pin chuck e lokela ho nahanoa ho latela lintlha tse ngata joalo ka bophara bo hlokahalang ba linoelo tse monyang, palo ea lintlha tsa convex le sebopeho sa chuck, 'me u etse khetho e nepahetseng ho latela boholo, boima ba adsorption. ntho le litlhoko tsa tikoloho ea ho sebetsa.
Re amohetse theknoloji e nepahetseng ea machining flat, re kenya tšebetsong moralo oa boqapi bakeng sa tloaelo, 'me re fana ka chuck e ntle ka ho fetisisa ea wafer pin ho fihlela litlhoko tse tiileng tsa bareki.
Sebopeho se bataletseng sa pin chuck se ka fetoloa ka bolokolohi ho latela sebopeho sa sephaphatha, 'me sebaka sa adsorption kapa pin se ka etsoa ka mokhoa o ikhethileng ho ntlafatsa karabelo ea adsorption.
Lintho tse bonahalang: Aluminium oxide ceramic kapa silicon carbide e ka khethoa, 'me DLC le Teflon li ka kenngoa holim'a metsi.
Li-chucks tsa SiC/SSiC tse nepahetseng haholo li ntse li ntlafatsoa bakeng sa ho pepesetsoa ka liphaephe, tlhahlobo, lits'ebetso tsa lipalangoang tse tenyetsehang haholo, tse bataletseng haholo, 'me li hanana le maemo a thata a ho sebetsa.
Lintlha tsa Tlhahlobo e nepahetseng
![sdw (2) wzk](https://ecdn6.globalso.com/upload/p/277/image_other/2024-01/6597c7d26042625053.jpg)
![sdw (3) pwr](https://ecdn6.globalso.com/upload/p/277/image_other/2024-01/6597c7c404fe578289.jpg)
![0af19965-9b3b-4d8d-b343-2a7da016f7d7(1)84c](https://ecdn6.globalso.com/upload/p/277/image_other/2024-01/6597d73dc695f48825.jpg)
Kopo
Tokiso ea Wafer ea sesebelisoa sa ho pepeseha ha semiconductor; Ho lokisoa ha Wafer ea sesebelisoa sa tlhahlobo ea wafer.