Ekhaya
Imveliso ephambili
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Microporous Ceramic Vacuum Chuck
Iimpawu zeCeramic vacuum chuck
Ukunyanzeliswa okuqinileyo: ukunyanzeliswa komoya okufanayo kunye nokungena kwamanzi, ukuqinisekisa amandla afanayo kunye nokubhengezwa ngokuqinileyo kwe-silicon wafer kwinkqubo yokugaya ngaphandle kwesilayidi.
Isakhiwo esixineneyo kunye nesifanayo: Ukwamkelwa kwezinto ezincinci ze-ceramic kunye ne-dense kunye nesakhiwo esifanayo, okungekho lula ukubhengeza uthuli lwe-silicon, kwaye i-chuck kulula ukuyicoca.
Amandla aphezulu: akukho deformation ngexesha lokugaya, ukuqinisekisa ukuba i-silicon wafer igxininiswe ngokulinganayo kwindawo nganye xa ugaya, kwaye akulula ukuba kwenzeke iziganeko zokuwa komphetho, i-debris.
Ubomi obude: ukugcinwa kwemilo yomphezulu kulungile, umjikelo wokunxiba mde kwaye isixa sokunxiba sincinci, ngoko unobomi obuphezulu.
Ukunxiba okulula: akuyi kubakho kuqhekeka, ukuqhekeka, ukubhula izinto xa unxiba.
I-Lightweight: Ngenxa yesakhiwo sangaphakathi se-pores, i-coefficient ethile ye-gravity yi-1.6-2.8.
Ukugquma okuphezulu: izinto zokugquma, phelisa umbane ongatshintshiyo.
Ukulawula Ukuchaneka
| udidi | Izinto ezisisiseko | Adsorption umphezulu imathiriyeli | Ubungakanani | Ukucaba | ubunzulu bokuhambelana |
| I-porous chuck | Ingxubevange yeAluminiyam | Porous SIC | ≤12μm | ≤15μm | ≤20μm |
| Yenziwe ngentsimbi eshayinayo | ≤10μm | ≤15μm | |||
| Alumina | ≤5μm | ≤8μm | |||
| Isilicon Carbide | ≤3μm | ≤8μm | |||
| I-chuck ye-ceramic ene-porous inoluhlu olupheleleyo lwenkcazo kunye nobukhulu, obunokusetyenziswa kumgca we-intshi ye-3-intshi, umgca we-intshi ye-4, umgca we-5-intshi, umgca we-intshi ye-6, umgca we-8-intshi kunye nomgca we-intshi eyi-12, kwaye ingenziwa ngokweenkcukacha kunye nobukhulu obufunayo. | |||||
| Ubungakanani obukhulu bemeko yangoku: 1600 * 1600m, ubukhulu ngu-50mm; | |||||
Iimpawu eziphathekayo ze-ceramic:
Izithako eziphambili: i-alumina Umbala: mnyama, intsimbi engwevu
Umxholo weAlumina: 92% Umxholo wokufuma: 0%
Imbobo: 2 ~ 30um Porosity: 35 ~ 40%
Amandla okugoba :6kgf/cm2 (Mpa) Umlinganiselo womthamo: 2.28g/cm3
Uhlobo lwe-Ceramic chuck
Ngokusetyenziswa, i-Ceramic chuck yahlulwe yaba:
Umatshini wokucheba oxhotyiswe nge: i-abrasive disc chuck, i-silicon wafer, i-sapphire substrate kunye nokunye okuncinciweyo;
Umatshini wokusika uxhotyiswe nge: scribing chuck, silicon wafer, semiconductor compound wafer kunye nokunye ukusika;
Umatshini wokucoca oxhotyiswe nge: ukucoca i-chuck;
Umatshini wokususa ifilimu uxhotyiswe: ifilimu yokususa i-chuck;
Umatshini wokulambisa uxhotyiswe nge: i-laminating chuck;
Umatshini wokushicilela uxhotyiswe nge: printing chuck.
Ukuqinisekisa umgangatho
I-Fountyl ineminyaka emininzi yamava obugcisa kubunjineli bokuchaneka kwe-ceramic kunye ne-ultra-precision processing kunye nokuveliswa, izixhobo ezahlukeneyo zokuhlalutya umzimba kunye neekhemikhali kunye nezixhobo zokulinganisa ijometri, ukuqinisekisa ukuzinza kwemveliso kunye nokuhambelana kwemveliso ye-ceramic chuck.
Isicelo seMveliso
I-porous chuck (itafile esebenzayo ye-adsorption) yinxalenye esetyenziswa kwinqanaba lokuvelisa i-semiconductor kwaye ihlanganiswe kumatshini wokubhala okanye isixhobo sokuhlola. Yimveliso enokusebenzisa ubume be-porous kunye noxinzelelo olubi lomphezulu webhentshi yokusebenzela ukugcina i-silicon ebhityileyo ye-wafer flat. Umatshini wokubhala usika iwafer yesilicon ngobubanzi obumalunga ne-20μm, ngoko ke imfuno yokucaba kunye nokuhambelana komphezulu we-wafer adsorption iphezulu kakhulu. Ngokweempawu zabo, izakhiwo ze-pore ezahlukeneyo zineendlela ezahlukeneyo zokusetyenziswa, njenge-ceramics ezincinci ezinommandla omkhulu ocacileyo kunye nobukhulu obuncinci be-pore, ngokuqhelekileyo kusetyenziswa kwi-bacterial filtration kunye ne-microbial fixation fields; Iiseramics ze-Mesoporous kunye nokusabalalisa kwedayimitha ethile zihlala zisetyenziselwa ukwahlula, i-adsorption catalysis fields. I-ceramics ye-Macroporous idla ngokufanelekileyo ukuhluzwa okugwenxa kwezinto ezinomxholo omkhulu kunye nobukhulu obukhulu.