Umqadi wesikwere kunye nesikhokelo sikaloliwe seqonga lokushukuma elichanekileyo kunye nezixhobo zokubona

Ukuthatha indibano ye-vacuum chuck njengomzekelo, imathiriyeli eyasetyenziswa kwasekuqaleni kwe-intshi ezi-2 kunye ne-4 intshi ye-wafer era yi-aviation aluminiyam, kodwa idibene nebhotile ye-flatness ephezulu kakhulu (ingcono kune-micron eyi-1) kwixesha lobukhulu obukhulu. ama-wafers (8 "nangaphezulu kwe-8"), engakwazi ukuhlangabezana nesalathisi esinzima se-ultra-high flatness kwaye isuswe. Okulandelayo, imathiriyeli ye-alumina njengotshintsho, imodyuli yayo e-elastic, ubunzima obulula, ukuqhutywa kwe-thermal kunye nokwandiswa komlinganiso kunye ne-silicon carbide dwarf, kodwa kungekhona kwintloni; Emva kokuphumelela kwitekhnoloji yokulungiselela ubukhulu obukhulu kunye nesakhiwo esinobume obukhethekileyo obunomngxuma we-silicon carbide ceramics, amacandelo abandakanya isiseko somsebenzisi esichanekileyo, isikhokelo somoya esichaneke kakhulu, kunye nengalo yokuhambisa i-wafer iye yaphuculwa.

Ayiyiyo kuphela indawo ye-silicon carbide ceramic ekhankanywe ngasentla edibana ne-Ultra-high echanekileyo izikhombisi ezinzima kwi-flatness, parallelism, kunye nokuthe nkqo, kucoceko oluphezulu lwesilicon carbide iinxalenye zeceramic ezifunekayo kwi-wafer diffusion, doping, etching process in semiconductor industry. , ngakumbi kubuchwephesha obuphezulu be-CVDSiC yokulungiselela izinto, inobuchwephesha benkqubo evuthiweyo, kwaye iye yaqonda ukwenziwa kwe-silicon carbide ceramic crystal boat ecocekileyo, i-silicon carbide ceramic bearing plate, i-silicon carbide ceramic air floating movement, i-silicon carbide ultra. -i-platform echanekileyo ehambayo, i-silicon carbide guide rail, i-silicon carbide slide components slide.

Kwixesha elizayo, siya kwandisa ngakumbi ukusetyenziswa kwezixhobo ze-silicon carbide kwishishini le-semiconductor kwaye negalelo ekuphuculweni kwekhonkco leshishini le-semiconductor kunye ne-silicon carbide ceramic industry. Ukuchaneka kweChina i-silicon carbide ceramic components uphando oluzimeleyo kunye nokukhuthazwa kwesicelo sasekhaya sele iqalile, ngophuhliso olunamandla lweshishini le-semiconductor, imfuno yemarike yolu hlobo lwesakhiwo se-ceramic esiphezulu siya kuba sikhulu ngakumbi, i-silicon carbide kunye nomzimba wayo obalaseleyo kunye iipropathi zeekhemikhali, kwishishini le-semiconductor linethuba elibanzi lokusetyenziswa.