Ikhaya
Umkhiqizo oyinhloko
I-square beam & nesitimela sokuqondisa senkundla yokunyakaza enembe kakhulu kanye nemishini yokuthola
Uma sithatha ukuhlanganiswa kwe-vacuum chuck njengesibonelo, into eyasetshenziswa esikhathini sakudala esingu-2 intshi no-4 inch wafer i-aviation aluminium, kodwa ihlangabezane nebhodlela lokucaba okuphezulu (okungcono kune-micron engu-1) esikhathini sosayizi omkhulu. ama-wafers (8 "nangaphezulu kuka-8"), angakwazi ukuhlangabezana nenkomba eqinile ye-ultra-high flatness futhi ayasuswa. Okulandelayo, impahla ye-alumina njengenguquko, i-modulus yayo enwebekayo, isisindo esilula, ukuqhutshwa kwe-thermal kanye ne-coefficient yokwandisa kanye ne-silicon carbide dwarf, kodwa hhayi kokunye okubangela amahloni; Ngemuva kwempumelelo yobuchwepheshe bokulungiselela i-silicon carbide Ceramics yesakhiwo esinosayizi omkhulu futhi eyinkimbinkimbi enomumo okhethekile ongenalutho, izakhi ezihlanganisa isisekelo se-workpiece enembe kakhulu, i-ultra-precision air float guide, kanye nengalo yokudlulisa eyilucwecwana iye yathuthukiswa.
Akuzona kuphela izingxenye zobumba ezishiwo ngenhla ze-silicon carbide Ceramic ezihlangabezana nezinkomba eziqinile zokunemba okuphezulu kakhulu kokucaba, ukufana, kanye nokuma, kwezingxenye ze-ceramic ze-silicon carbide Ceramic ezidingekayo ekusakazeni isicwecwe, i-doping, izinqubo zokuhlanganisa embonini ye-semiconductor. , ikakhulukazi kubuchwepheshe bokulungiselela izinto ezibonakalayo be-CVDSiC obuhlanzekile, bunobuchwepheshe benqubo yokuvuthwa, futhi iye yaqaphela ukwakhiwa kwesikebhe se-silicon carbide ceramic crystal boat, i-silicon carbide ceramic bearing plate, i-silicon carbide ceramic air floating platform, i-silicon carbide ultra. -Iplatifomu ehambayo eqondile, isitimela se-silicon carbide guide, i-silicon carbide slide rail components.
Ngokuzayo, sizoqhubeka nokwandisa ukusetshenziswa kwe-silicon carbide embonini ye-semiconductor futhi sibambe iqhaza ekuthuthukisweni kochungechunge lwemboni ye-semiconductor kanye nemboni ye-silicon carbide ceramic. Ukucwaninga okuzimele kwe-silicon carbide ceramic izingxenye zocwaningo oluzimele kanye nokukhuthazwa kwesicelo sasekhaya kusanda kuqala, ngokuthuthukiswa okunamandla kwemboni ye-semiconductor, isidingo semakethe salolu hlobo lwesakhiwo se-ceramic esisezingeni eliphezulu sizoba sikhulu nakakhulu, i-silicon carbide enomzimba wayo omuhle kakhulu futhi. izakhiwo zamakhemikhali, embonini ye-semiconductor inamathemba okusebenza abanzi.
Ama-ceramics e-silicon carbide awagcini nje ngokuba nezinto ezinhle kakhulu zemishini ekamelweni lokushisa, njengamandla aphezulu okugoba, ukumelana ne-oxidation enhle kakhulu, ukumelana nokugqwala okuhle, ukumelana nokugqoka okuphezulu kanye ne-coefficient ephansi yokungqubuzana, kodwa futhi nezakhiwo zokushisa eziphakeme (amandla, ukumelana nokukhasa, njll.) yizinto ze-ceramic ezaziwa kakhulu. I-Silicon carbide inezici zokumelana nokugqwala, ukumelana nokushisa okuphezulu, amandla aphezulu, ukuqhutshwa kahle kwe-thermal, ukumelana nomthelela ... njll.
Izidingo zomshini we-lithography wesakhiwo setafula le-workpiece: I-Ultra-lightweight (nciphisa inertia enyakazayo, yehlisa umthwalo wemoto), ukuzinza okuphezulu kakhulu (umshini wokwenza izinto ngokunemba okuphezulu kudinga ukunyakaza nokuma okunembayo okuphezulu, okudinga ukuwohloka kobukhulu obuncane bokunwebeka okushisayo nezinye izici. ), ukuhlanzeka (ukuqina okuphezulu nokumelana nokugqoka okuphezulu), Ingakwazi ukuhlangabezana nezidingo zobuchwepheshe zobukhulu obukhulu, udonga oluncane olungenalutho, isakhiwo esiyinkimbinkimbi kanye nokunemba kwezingxenye zesakhiwo se-silicon carbide yemishini ebalulekile yokukhiqiza isekethe ehlanganisiwe emelwe umshini we-photolithography.
Amakhono e-Fountyl
Ubukhulu bosayizi:1600 mm.
Ukwenza ngokwezifiso isakhiwo:isakhiwo engasindi, kungenziwa yakhelwe ukunciphisa isisindo isakhiwo.
Ukunemba okuphezulu:I-flatness ingalawulwa ngaphakathi kwama-microns angu-5 noma ngokunemba okuphezulu nakakhulu.