Ceramic Vacuum Chuck for Precision Cleaning | High-Quality Solution

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Ring groove chuck is widely used in semiconductor production equipment to absorb, fix, transfer and handle the silicon wafers, wafers and various workpieces and materials.

Porous air floating platform with the load transfer technology of non-contact mode for semiconductor industry

Zirconia used for wear resistant parts, heat resistant parts

Quartz glass melted with various kinds of pure natural quartz

Beryllium oxide ceramic parts used for auto and semiconductor and large integrated circuit

Silicon carbide used for corrosion resistant parts, seals parts, high temperature resistant parts, guide rails and square beams

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High purity graphite has high temperature resistance, good electrical conductivity and chemical stability, and has become a key material in the semiconductor field.

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Ceramic Vacuum Chuck for Precision Cleaning | High-Quality Solution

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