Tsev
Khoom siv
Silicon carbide siv rau corrosion resistant qhov chaw, sealing qhov chaw, kub resistant qhov chaw, qhia rails thiab square beams
Silicon carbide ceramics muaj cov khoom zoo heev ntawm qhov kub thiab txias, xws li lub zog siab, siab hardness, siab elastic modulus, zoo heev kub stability, xws li thermal conductivity, tsis tshua muaj thermal expansion coefficient, thiab zoo tshwj xeeb nruj thiab kho qhov muag khoom, tshwj xeeb tshaj yog haum. rau kev npaj cov tshuab photolithography thiab lwm yam khoom siv hluav taws xob sib xyaw ua ke rau precision ceramic yam ntxwv qhov chaw. Xws li siv nyob rau hauv lub photolithography tshuab precision txav workpiece rooj, pob txha, suction khob, dej-txias phaj thiab precision ntsuas daim iav, grating thiab lwm yam ceramic structural qhov chaw, Fountyl tshiab khoom tom qab xyoo ntawm kev tshawb fawb, daws qhov loj loj, nyias phab ntsa, hollow thiab lwm yam complex qauv ntawm silicon carbide structural qhov chaw precision ua thiab kev npaj teeb meem, tawg los ntawm cov kev bottleneck ntawm no hom precision silicon carbide structural qhov chaw npaj technology. Nws tau zoo heev txhawb lub localization ntawm cov yam ntxwv tseem ceeb qhov chaw siv nyob rau hauv integrated circuit manufacturing khoom.
● Silicon carbide ceramics mas muaj xws li pressureless sintering silicon carbide (SSiC), tshuaj tiv thaiv-sintered silicon carbide (RBSC), tshuaj vapor deposition silicon carbide (CVD-SiC).
● Silicon carbide muaj ntau yam khoom zoo: super tawv, hnav tsis kam, siab thermal conductivity thiab mechanical zog, thermal expansion coefficient, zoo thermal stability, tsis tshua muaj ntom, siab nruj, tsis-sib nqus.
● Tam sim no, silicon carbide ceramics yog siv rau hauv ntau yam lag luam xws li aviation, aerospace thiab nuclear kev lag luam, xws li ceramic qhov chaw ntawm high-end khoom siv rau silicon carbide ceramic reflector thiab IC integrated circuit manufacturing, tshav kub exchangers thiab bulletproof cov ntaub ntawv nyob rau hauv huab mob.
Nta ntawm precision ceramic structural qhov chaw rau integrated circuit manufacturing khoom:
① Lub teeb yuag heev: txhawm rau txo qhov kev txav tsis zoo, txo lub cev muaj zog, txhim kho cov lus tsa suab, ua kom raug thiab ruaj khov, cov khoom siv feem ntau siv cov qauv tsim, lub teeb yuag yog 60-80%, mus txog 90%;
② High form-txoj hauj lwm raug: Yuav kom ua tiav high-precision txav thiab qhov chaw, cov txheej txheem yuav tsum muaj daim ntawv siab heev thiab txoj hauj lwm raug, lub flatness, parallelism thiab perpendicularity yuav tsum tsawg tshaj li 1μm, thiab daim ntawv thiab txoj hauj lwm raug yuav tsum tau tsawg dua 5μm.
③ High dimensional stability: Yuav kom ua tiav high-precision txav thiab qhov chaw, cov txheej txheem yuav tsum muaj qhov ruaj khov siab heev, tsis txhob tsim cov strain, thiab thermal conductivity, tsis tshua muaj thermal expansion coefficient, tsis yooj yim los tsim loj loj deformation. ;
④ Ntxuav thiab tsis muaj kuab paug. Cov txheej txheem yuav tsum muaj kev sib txhuam coefficient tsis tshua muaj siab, me me kinetic zog poob thaum lub sij hawm txav, thiab tsis muaj kev sib tsoo cov pa phem. Cov khoom siv silicone carbide muaj cov qauv elastic heev, thermal conductivity thiab thermal expansion coefficient, tsis yooj yim los tsim khoov kev nyuaj siab deformation thiab thermal strain, thiab muaj polishability zoo, tuaj yeem ua rau daim iav zoo heev; Yog li ntawd, nws muaj txiaj ntsig zoo rau kev siv silicon carbide raws li cov khoom siv tshwj xeeb rau cov khoom siv tseem ceeb ntawm kev sib koom ua ke xws li photolithography tshuab, Silicon carbide muaj qhov zoo ntawm cov tshuaj lom neeg ruaj khov, muaj zog txhua yam, siab thermal conductivity thiab thermal expansion coefficient, thiab tuaj yeem siv rau hauv qhov kub thiab txias, kub siab, corrosion thiab hluav taws xob ntawm qhov chaw huab cua.
Silicon carbide muaj qhov zoo ntawm kev ruaj ntseg zoo, muaj zog txhua yam, siab thermal conductivity thiab thermal expansion coefficient tsawg, thiab tuaj yeem siv rau hauv qhov kub thiab txias, siab siab, corrosion thiab hluav taws xob ntawm huab cua puag ncig.
Cov khoom siv tseem ceeb ntawm kev sib xyaw ua ke yuav tsum muaj cov khoom siv sib xyaw ua ke muaj cov yam ntxwv ntawm lub teeb yuag, siab zog, siab thermal conductivity thiab qis thermal expansion coefficient, thiab ntom ntom ntom thiab tsis muaj qhov tsis xws luag. Cov Cheebtsam yuav tsum muaj qhov tseeb ntawm qhov tseeb thiab qhov ruaj khov kom ntseeg tau tias muaj kev txav mus los ultra-precision thiab tswj cov khoom siv. Silicon carbide ceramics muaj lub siab elastic modulus thiab nruj nruj, tsis yooj yim rau deform, thiab muaj cov thermal conductivity thiab qis thermal expansion coefficient, siab thermal stability, yog li silicon carbide ceramics yog cov khoom siv zoo heev, tam sim no nyob rau hauv kev tsim hluav taws xob sib xyaw ua ke. Cov cuab yeej tseem ceeb kom tau txais ntau yam kev siv, xws li lithography tshuab nrog silicon carbide ua hauj lwm rooj, qhia rail, reflector, ceramic chuck, thiab ceramic kawg effector.
Fountyl tuaj yeem ua tau raws li lub tshuab photolithography raws li tus neeg sawv cev ntawm cov khoom siv hluav taws xob sib xyaw ua ke nrog cov khoom loj, hollow nyias phab ntsa, cov qauv nyuaj, precision silicon carbide structural qhov chaw npaj tshuab, xws li: silicon carbide nqus chuck, qhia rail, reflector, ua hauj lwm rooj thiab ib tug series ntawm precision silicon carbide structural qhov chaw rau photolithography tshuab.
| Cov khoom | Fountyl | ||
| Qhov ceev (g / cm3) | 2.98-3.02 Nws | ||
| Young's Modulus (GPa) | 368 | ||
| Flexural zog (MPa) | 334 ib | ||
| Weibull | 8.35 Nws | ||
| CTE (× 10-6 / ℃) | 100 ℃ | 2.8 × 10-6 | |
| 400 ℃ | 3.6 × 10-6 | ||
| 800 ℃ | 4.2 × 10-6 | ||
| 1000 ℃ | 4.6 × 10-6 | ||
| Thermal conductivity (W / m·k) (20 ºC) | 160-180 : kuv | ||
| Poisson tus piv | 0.187 ib | ||
| Shear Modulus (GPa) | 155 | ||