Research on vacuum semiconductor equipment parts industry

At present, domestic vacuum semiconductor parts are equivalent to the development stage of domestic semiconductor equipment about 3 to 5 years ago, and several domestic suppliers of various parts and components continue to research and development, but are limited by the technology gap has not fully met the needs of downstream semiconductor equipment manufacturers. Among the 43 major suppliers of 20 types of semiconductor core parts and components disclosed by ICWorld in 2020, there are about 20 American suppliers (nearly 45%), 16 Japanese suppliers (nearly 36%), and 2 each from Germany, Switzerland and South Korea, all of which are foreign suppliers, mainly monopolized by the United States and Japan, and the industry concentration is high. At present, domestic enterprises can basically meet the self-sufficiency in the field of sheet metal parts, metal parts, cavities and other mechanical parts, and the localization rate is more than 50%, and some enterprises even enter the supply chain of overseas head manufacturers. However, the self-sufficiency rate of electrostatic suction cups, sealing rings, EFEM, RF power supplies, silicon electrodes, gas flow meters, valves, vacuum gauges and other relatively difficult precision parts is less than 1 to 5%.

The lag in the development of semiconductor precision parts is mainly due to the complex semiconductor key parts process, high precision requirements, long certification cycle, most foreign leaders have formed a high barrier to entry after years of accumulation, and the domestic general parts industry layout has been missing for a long time, on the other hand, various types of parts, relatively small batch, special size, etc. The market segment size is scattered, the market demand space has a ceiling, the initial relying on the advance development of the equipment industry, the long-term lack of capital attention and pursuit, it is expected that the "specialized and special new" small and medium-sized enterprises listing channel will help the manufacturers of segmented products get considerable development, CVC (Corporate capital) and the development of international markets will also become an important way for parts companies to amplify their advantages.

Semiconductor parts Industry Overview

We divide semiconductor front-end equipment into three categories:

• optical equipment, mainly including lithography machines and measuring/testing equipment,
• dry equipment, mainly including etching machines, PVD, CVD, ion implantation machines, etc.,
• wet equipment, mainly including cleaning equipment, coating development equipment and CMP equipment.

The classification of various semiconductor parts and the equipment used for them corresponds to the following:

Parts and components enterprises are divided into twelve categories according to the main materials and functions of semiconductor parts, including

1. Silicon/silicon carbide parts,
2. Quartz parts,
3. Ceramic parts,
4. Metal parts,
5. Graphite parts,
6. Plastic parts,
7. Vacuum parts,
8. Seals,
9. Filter parts,
10. Moving parts,
11. Electric control parts and
12. Other parts.

Each of these parts also includes a number of sub-products, such as vacuum parts, including vacuum gauge (measuring process vacuum), vacuum pressure gauge, gas flow meter (MFC), vacuum valve parts, vacuum pumps and other key parts.

Dry process equipment company parts procurement, the company's prospectus semiconductor equipment parts are classified into mechanical, gas transmission series, electrical, electromechanical integration, vacuum system, pneumatic system, instrumentation, sensors and other 8 categories:

• Mechanical: Reaction chamber, transport chamber, equipment support frame, sheet metal shell, silicon carbide shower head electrode, ceramic coating upper electrode, electrostatic suction cup lower electrode, graphite chart tray, shell outer box, etc.
• Gas transmission series: gas cabinet, welding parts, etc.;
• Electrical: programmable controller, I/O module, AC module, DC module, industrial computer, programmable control power supply, heater, distribution cabinet, wiring harness, etc.
• Electromechanical integration: manipulator, ceramic runner, fire alarm extinguishing device, temperature control measurement system, import and export air valve;
• Vacuum system: dry pump, molecular pump, vacuum valve, transmission valve, etc.
• Pneumatic systems: solenoid valves, connectors, etc.;
• Instrumentation: gas flow meter, pressure controller, etc.
• Sensor class: photoelectric sensor, pressure sensor, temperature sensor, etc.

According to the procurement of parts and components of micro and medium companies in 2016-2018, the mechanical category is the highest proportion of the value of parts and components (accounting for about 40%), and the gas transmission series category accounts for the second largest proportion (accounting for about 20%). The procurement situation of Yitang Shares and Tuojing Technology is similar to that of micro and medium companies, and the proportion of machinery, mechanical and electrical integration and electrical procurement is larger. In addition to cavity, sheet metal parts, metal parts, quartz parts, ceramic parts, RF generators, RF power supplies, robots and other mechanical, electrical, mechanical and electrical components are the main parts purchased by dry process equipment manufacturers. Plasma, vacuum and other processes are used more in dry equipment, so gas control cabinets, pipeline welding parts, dry pumps, molecular pumps, vacuum valves and other gas conveying and vacuum system components account for 7 to 9% of the share of equipment enterprise procurement.

Fountyl Technologies Pte Ltd., is focusing with 20 years of the semiconductor industry experience of advanced ceramic parts manufacturing in Singapore, main product is wafer pin silicon carbide chuck, porous silicon carbide chuck, ceramic end effector, ceramic beam & guide, which made of various kinds of ceramic materials(alumina,zirconia,silicon carbide, silicon nitride, aluminum nitride and porous ceramics),fully independent control of ceramic material sintering, precision processing, testing, and precision cleaning, with guaranteed delivery time. Products are exported to the United States, Europe and Southeast Asia , more than 20 countries and regions.