Kunyumba
Zipangizo
Silicon carbide yomwe imagwiritsidwa ntchito pazigawo zosagwirizana ndi dzimbiri, zisindikizo, zida zolimbana ndi kutentha kwambiri, njanji zowongolera ndi mizati yayikulu.
Silicon carbide ceramics imakhala ndi makina abwino kwambiri pa kutentha kwabwino, monga mphamvu yayikulu, kuuma kwakukulu, modulus yotanuka kwambiri, kukhazikika kwapamwamba kwambiri kwa kutentha, monga kutentha kwapamwamba, kutsika kwa kutentha kwapakati, ndi kuuma kwapadera komanso mawonekedwe opangira kuwala, makamaka oyenera. pokonza makina a photolithography ndi zida zina zophatikizika zamagawo zopangira zida za ceramic mwatsatanetsatane. Monga ntchito photolithography makina mwatsatanetsatane kusuntha workpiece tebulo, mafupa, kuyamwa chikho, madzi utakhazikika mbale ndi mwatsatanetsatane galasi kuyeza, kabati ndi zina ceramic structural mbali, Fountyl zinthu zatsopano pambuyo zaka kafukufuku luso, kuthetsa kukula lalikulu, woonda khoma, dzenje ndi zina zovuta kapangidwe ka silicon carbide structural zigawo mwatsatanetsatane kukonza ndi kukonzekera mavuto, kuswa botolo luso la mtundu wa mwatsatanetsatane silicon carbide structural mbali kukonzekera teknoloji. Zalimbikitsa kwambiri kukhazikitsidwa kwa magawo ofunikira omwe amagwiritsidwa ntchito pazida zophatikizira zamagawo.
● Silicon carbide ceramics makamaka imaphatikizapo pressureless sintering silicon carbide (SSiC), reaction-sintered silicon carbide (RBSC), chemical vapor deposition silicon carbide (CVD-SiC).
● Silicon carbide ili ndi zinthu zambiri zabwino kwambiri: zolimba kwambiri, kukana kuvala, kutsekemera kwapamwamba kwa kutentha ndi mphamvu zamakina, kutsika kwa kutentha kwapang'onopang'ono, kukhazikika kwabwino kwa kutentha, kutsika kochepa, kuuma kwapadera, kusakhala ndi maginito.
● Pakalipano, zoumba za silicon carbide zimagwiritsidwa ntchito m'mafakitale osiyanasiyana monga ndege, ndege ndi mafakitale a nyukiliya, monga zida za ceramic za zipangizo zamtengo wapatali za silicon carbide ceramic reflector ndi IC Integrated circuit kupanga, kutentha kwa kutentha ndi zipangizo za bulletproof pansi pa zovuta kwambiri.
Mawonekedwe a magawo olondola a ceramic pazida zophatikizika zopangira dera:
① Opepuka kwambiri: Kuti muchepetse kusuntha, kuchepetsa kuchuluka kwa magalimoto, kuwongolera kuyenda bwino, kuwongolera bwino komanso kukhazikika, magawo omangika nthawi zambiri amagwiritsa ntchito mapangidwe opepuka, opepuka ndi 60-80%, mpaka 90%;
② Kulondola kwa mawonekedwe apamwamba: Kuti mukwaniritse kayendetsedwe kabwino kwambiri komanso kayimidwe kake, zigawo zamapangidwe zimafunika kukhala ndi mawonekedwe apamwamba kwambiri komanso malo olondola, kusalala, kufanana ndi perpendicularity ziyenera kukhala zosakwana 1μm, ndipo mawonekedwe ndi kulondola kwamalo kumafunika kukhala osachepera 5μm.
③ Kukhazikika kwapamwamba kwambiri: Kuti mukwaniritse kusuntha kolondola kwambiri komanso kuyika bwino, magawo omangika amafunikira kuti azikhala okhazikika kwambiri, osapanga kupsinjika, komanso kukhathamiritsa kwamafuta ambiri, kutsika kwamafuta pang'ono, kocheperako, kosavuta kupanga mawonekedwe akulu akulu. ;
④ Ayeretseni komanso opanda kuipitsa. Magawo omangika amayenera kukhala otsika kwambiri, kutayika kwamphamvu kwapang'onopang'ono pakuyenda, komanso kusawononga tinthu tating'ono. Silicon carbide zinthu zili ndi modulus zotanuka kwambiri, matenthedwe otenthetsera komanso kukulitsa kocheperako kwamafuta, sikophweka kutulutsa kupindika kwa kupsinjika ndi kupsinjika kwamafuta, ndipo kumakhala ndi kupukuta kwabwino kwambiri, kumatha kupangidwa kukhala kalilole wabwino kwambiri; Chifukwa chake, ili ndi zabwino zambiri kugwiritsa ntchito silicon carbide monga zida zopangira zida zofunikira zamagawo ophatikizika monga makina a photolithography, Silicon carbide ili ndi ubwino wokhala ndi kukhazikika kwamankhwala, mphamvu zamakina apamwamba, kukhathamiritsa kwamafuta apamwamba komanso kutsika kwamafuta ochepa, ndipo angagwiritsidwe ntchito kutentha, kuthamanga kwambiri, dzimbiri ndi ma radiation a kwambiri chilengedwe.
Silicon carbide ili ndi ubwino wokhala ndi kukhazikika kwa mankhwala, mphamvu zamakina apamwamba, kutsekemera kwapamwamba kwambiri komanso kutsika kwa kutentha kwapakati, ndipo ingagwiritsidwe ntchito kutentha kwambiri, kuthamanga kwambiri, dzimbiri ndi ma radiation a malo ovuta kwambiri.
Zida zofunikira za dera lophatikizika zimafunikira kuti zida zamagulu zikhale ndi mawonekedwe a kulemera kopepuka, mphamvu yayikulu, ma conductivity apamwamba amafuta komanso kuchuluka kwamafuta otsika, ndipo ndi wandiweyani komanso yunifolomu popanda zolakwika. Zigawo zimafunika kuti zikhale zolondola kwambiri komanso zokhazikika kuti zitsimikizire kuyenda kolondola kwambiri komanso kuwongolera zida. Silicon carbide ceramics imakhala ndi zotanuka kwambiri modulus komanso kuuma kwina, osati kosavuta kupunduka, ndipo imakhala ndi matenthedwe apamwamba kwambiri komanso kutsika kwamafuta ochepa, kukhazikika kwamafuta ambiri, kotero kuti silicon carbide ceramics ndizinthu zomangika bwino kwambiri, zomwe pakadali pano zimapangidwira magawo ophatikizika. zida zofunika kupeza ntchito zosiyanasiyana, monga lithography makina ndi silicon carbide ntchito tebulo, kalozera njanji, reflector, ceramic chuck, ndi ceramic end effector.
Fountyl akhoza kukumana ndi makina photolithography monga woimira Integrated dera kupanga zida kiyi ndi kukula lalikulu, dzenje woonda khoma, dongosolo zovuta, mwatsatanetsatane pakachitsulo carbide structural mbali luso luso kukonzekera, monga: silicon carbide vacuum chuck, njanji kalozera, reflector, tebulo ntchito. ndi mndandanda wazitsulo zolondola za silicon carbide zamakina a photolithography.
| Katundu | Fontyl | ||
| Kachulukidwe (g/cm3) | 2.98-3.02 | ||
| Young's Modulus (GPa) | 368 | ||
| Flexural mphamvu (MPa) | 334 | ||
| Weibull | 8.35 | ||
| CTE (× 10-6 / ℃) | 100 ℃ | 2.8 × 10-6 | |
| 400 ℃ | 3.6 × 10-6 | ||
| 800 ℃ | 4.2 × 10-6 | ||
| 1000 ℃ | 4.6 × 10-6 | ||
| Thermal Conductivity(W/m·k) (20 ºC) | 160-180 | ||
| Chiwerengero cha Poisson | 0.187 | ||
| Shear modulus (GPa) | 155 | ||