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Carbide ya Silicon ikoreshwa mubice birwanya ruswa, ibice bifunga kashe, ibice birwanya ubushyuhe bwinshi, inzira ziyobora hamwe nimirongo ya kare
Ceramics ya silicon karbide ifite imiterere yubukanishi bwubushyuhe busanzwe, nkimbaraga nyinshi, ubukana bwinshi, modulus yo hejuru ya elastike, ihindagurika ryubushyuhe bwo hejuru cyane, nkubushyuhe bwo hejuru bwumuriro mwinshi, coefficente yo kwagura ubushyuhe buke, hamwe nuburyo bukomeye bwo gukomera hamwe nuburyo bwo gutunganya neza, cyane cyane birakwiriye mugutegura imashini ya Photolithography nibindi bikoresho byumuzunguruko byahujwe kubice byububiko bwa ceramic. Nkibikoreshwa mumashini ya Photolithography neza yimuka kumurimo wakazi, skeleton, igikombe cyokunywa, isahani ikonjesha amazi hamwe nindorerwamo yo gupima neza, gusya hamwe nibindi bice byubatswe byubutaka, Fountyl ibikoresho bishya nyuma yubushakashatsi bwa tekiniki, bikemura ubunini bunini, urukuta ruto, Hollow hamwe nubundi buryo bugoye bwa silicon karbide ibice byubatswe neza gutunganya no gutunganya ibibazo, gucamo icyuho cya tekinike yubwoko nkubu bwa silicon karbide yuzuye ibice byubaka tekinoroji. Yateje imbere cyane kwimiterere yibice byingenzi byubatswe bikoreshwa mubikoresho bikoreshwa mukuzunguruka.
C Ceramics ya silicon karbide cyane cyane irimo karbide ya silicon idafite imbaraga (SSiC), karbide ya silicon karbide (RBSC), imyuka ya chimique yoherejwe na silicon karbide (CVD-SiC).
Carb Carbide ya Silicon ifite ibintu bitandukanye byiza cyane: birenze urugero, kwambara birwanya imbaraga, ubushyuhe bwumuriro mwinshi nimbaraga za mashini, coefficente yo kwagura ubushyuhe buke, ubushyuhe buhebuje bwumuriro, ubucucike buke, ubukana bwihariye, butari magnetique.
● Kugeza ubu, ubukorikori bwa silicon karbide bukoreshwa mu nganda zinyuranye nko mu ndege, mu kirere no mu nganda za kirimbuzi, nk'ibice bya ceramique by'ibikoresho byo mu rwego rwo hejuru bya silicon carbide ceramic reflektor hamwe na IC ihuriweho n'imizunguruko, guhanahana ubushyuhe n'ibikoresho bitagira amasasu mu bihe bikabije.
Ibiranga ibice byububiko byububiko bwibikoresho bikoreshwa mukuzunguruka:
Light Umucyo mwinshi: Kugirango ugabanye inertia yimodoka, kugabanya umutwaro wa moteri, kunoza imikorere yimikorere, guhagarara neza neza no guhagarara neza, ibice byubatswe mubisanzwe bikoresha igishushanyo mbonera cyoroheje, igipimo cyoroheje ni 60-80%, kugeza 90%;
Form Imiterere-yimyanya ihanitse: Kugirango ugere kumurongo wuzuye-uhagaze neza, ibice byubatswe birasabwa kugira imiterere ihanitse cyane kandi ihagaze neza, uburinganire, uburinganire hamwe na perpendicularity birasabwa kuba munsi ya 1 mm, nuburyo na imyanya nyayo isabwa kuba munsi ya 5μm.
Stability Iterambere rihanitse: Kugirango ugere kumurongo uhamye kandi uhagaze, ibice byubatswe birasabwa kugira ihame rirerire cyane, ntibitange ingufu, hamwe nubushyuhe bwo hejuru bwumuriro, coefficente yo kwagura ubushyuhe buke, ntibyoroshye kubyara ibintu binini cyane. ;
④ Isuku kandi idafite umwanda. Ibice byubatswe birasabwa kugira coefficient de fraux nkeya cyane, gutakaza ingufu za kinetic ntoya mugihe cyo kugenda, kandi nta kwanduza uduce duto. Ibikoresho bya karibide ya silicon ifite modulus yo hejuru cyane, itwara ubushyuhe hamwe nubushobozi buke bwo kwagura ubushyuhe, ntabwo byoroshye kubyara ihindagurika ryimyuka ihindagurika hamwe nubushyuhe bwumuriro, kandi ifite polishable nziza, irashobora gukorerwa indorerwamo nziza; Kubwibyo, Ifite ibyiza byinshi byo gukoresha karubone ya silicon nkibikoresho byububiko bwibikoresho byingenzi byingirakamaro zumuzunguruko nka mashini ya Photolithography, Carbide ya Silicon ifite ibyiza byo guhagarara neza kwimiti, imbaraga za mashini nyinshi, ubushyuhe bukabije bwumuriro hamwe na coefficient yo kwagura ubushyuhe, kandi irashobora gukoreshwa mubushyuhe bwo hejuru, umuvuduko mwinshi, ruswa hamwe nimirasire yibidukikije bikabije.
Carbide ya silicon ifite ibyiza byo gutekinika neza kwimiti, imbaraga za mashini nyinshi, ubukana bwumuriro mwinshi hamwe na coefficient yo kwagura ubushyuhe buke, kandi irashobora gukoreshwa mubushyuhe bwinshi, umuvuduko mwinshi, ruswa hamwe nimirasire yibidukikije bikabije.
Ibikoresho byingenzi byumuzunguruko uhuriweho bisaba ko ibikoresho bigize ibice bifite ibiranga uburemere bworoshye, imbaraga nyinshi, ubushyuhe bwinshi bwumuriro hamwe na coefficente yo kwagura ubushyuhe buke, kandi ni byinshi kandi bidafite inenge. Ibigize birasabwa kugira uburebure buhanitse cyane kandi butajegajega kugirango harebwe ultra-precision kugenda no kugenzura ibikoresho. Ceramics ya silicon karbide ifite modulus ihanitse kandi idakomeye, ntabwo byoroshye guhinduka, kandi ifite ubushyuhe bwo hejuru bwumuriro hamwe na coefficente yo kwaguka yubushyuhe buke, ihindagurika ryinshi ryumuriro, bityo rero ceramika ya silicon karbide nibikoresho byiza byubatswe, kuri ubu mubikorwa byuzuzanya byuzuzanya ibikoresho by'ingenzi kugirango ubone porogaramu zitandukanye, nk'imashini ya lithographie hamwe na silicon karbide ikora, ayobora gari ya moshi, imurika, ceramic chuck, na ceramic end effektor.
Fountyl irashobora guhura na mashini ya Photolithography nkuhagarariye ibikoresho byumuzunguruko wibikoresho byingenzi bifite ubunini bunini, urukuta ruto ruto, urukuta rugoye, sisitemu ya silicon karbide yububiko ibice byateguwe, nka: silicon karbide vacuum chuck, kuyobora gari ya moshi, kugarura, kumeza yakazi hamwe nuruhererekane rwibintu bya silicon karbide ibice byubatswe kumashini ya Photolithography.
| Ibyiza | Isoko | ||
| Ubucucike （g / cm3) | 2.98-3.02 | ||
| Modulus yumusore （GPa） | 368 | ||
| Imbaraga zoroshye （MPa） | 334 | ||
| Weibull | 8.35 | ||
| CTE （× 10-6 / ℃） | 100 ℃ | 2.8 × 10-6 | |
| 400 ℃ | 3.6 × 10-6 | ||
| 800 ℃ | 4.2 × 10-6 | ||
| 1000 ℃ | 4.6 × 10-6 | ||
| Amashanyarazi (W / m · k) (20 ºC) | 160-180 | ||
| Ikigereranyo cya Poisson | 0.187 | ||
| Shear modulus （GPa） | 155 | ||