Lehae
Lisebelisoa
0102030405
Silicon carbide e sebelisetsoang likarolo tse thibelang kutu, likarolo tsa tiiso, likarolo tse hanyetsanang le mocheso o phahameng, liporo tsa tataiso le maballo a sekwere.
Li-ceramics tsa silicon carbide li na le thepa e ntle ea mochini mochesong o tloaelehileng, joalo ka matla a phahameng, boima bo phahameng, modulus e phahameng, botsitso bo phahameng ba mocheso, joalo ka conductivity e phahameng ea mocheso, coefficient e tlase ea ho atolosoa ha mocheso, le ho satalla ho khethehileng le thepa ea ho sebetsa ea optical, haholo-holo e loketseng. bakeng sa ho lokisa mochine oa photolithography le lisebelisoa tse ling tse kopantsoeng tsa potoloho bakeng sa likarolo tse nepahetseng tsa sebopeho sa ceramic. Joalo ka ha e sebelisoa mochining oa photolithography ka nepo e tsamaisang tafole, skeleton, senoelo sa ho monya, poleiti e pholileng ka metsi le seipone sa tekanyo e nepahetseng, grating le likarolo tse ling tsa meralo ea ceramic, lisebelisoa tse ncha tsa Fountyl kamora lilemo tsa lipatlisiso tsa tekheniki, rarolla boholo bo boholo, lerako le tšesaane, Sebopeho se se nang letho le tse ling tse rarahaneng tsa silicon carbide likarolo tsa sebopeho se nepahetseng le mathata a ho lokisa, ho phunyeletsa botlolo ea tekheniki ea mofuta ona oa theknoloji ea ho lokisa likarolo tsa silicon carbide. E khothalelitse haholo ho kenngoa ha likarolo tsa bohlokoa tsa meralo tse sebelisoang lisebelisoa tsa tlhahiso ea potoloho e kopaneng.
● Silicon carbide ceramics haholo-holo e kenyelletsa khatello ea sintering silicon carbide (SSiC), reaction-sintered silicon carbide (RBSC), lik'hemik'hale tsa mouoane deposition silicon carbide (CVD-SiC).
● Silicon carbide e na le mefuta e sa tšoaneng ea lintho tse babatsehang: ho thata haholo, ho hanyetsa ho apara, ho khanna ho matla ha mocheso le matla a mochine, coefficient e tlaase ea ho atolosa mocheso, botsitso bo botle ba mocheso, boima bo tlaase, boima bo phahameng bo khethehileng, bo se nang magnetic.
● Hona joale, li-ceramics tsa silicon carbide li sebelisoa liindastering tse sa tšoaneng tse kang lifofane, lifofane le indasteri ea nyutlelie, tse kang likarolo tsa ceramic tsa thepa ea boleng bo phahameng bakeng sa silicon carbide ceramic reflector le IC integrated circuit circuit, lisebelisoa tsa mocheso le lisebelisoa tse thibelang likulo tlas'a maemo a feteletseng.
Likarolo tsa likarolo tse nepahetseng tsa meralo ea ceramic bakeng sa lisebelisoa tse kopaneng tsa tlhahiso ea potoloho:
① E bobebe haholo: Bakeng sa ho fokotsa ho sisinyeha ha motsamao, ho fokotsa moroalo oa enjene, ho ntlafatsa ts'ebetso ea motsamao, ho nepahala ha maemo le botsitso, likarolo tsa meralo hangata li sebelisa moralo o bobebe oa sebopeho, sekhahla se bobebe ke 60-80%, ho fihla ho 90%;
② Ho nepahala ha boemo bo phahameng: E le ho finyella motsamao le boemo bo nepahetseng bo phahameng, likarolo tsa meralo li tlameha ho ba le sebopeho se phahameng haholo le boemo bo nepahetseng, ho bata, ho ts'oana le perpendicularity ho hlokahala hore e be ka tlase ho 1μm, 'me foromo le ho nepahala ha boemo hoa hlokahala ho ba ka tlase ho 5μm.
③ Botsitso bo phahameng ba boemo bo phahameng: E le ho fihlela motsamao o nepahetseng le maemo a holimo, likarolo tsa sebopeho li tlameha ho ba le botsitso bo phahameng haholo, eseng ho hlahisa khatello, le conductivity e phahameng ea mocheso, coefficient e tlase ea katoloso ea mocheso, ha ho bonolo ho hlahisa deformation e kholo. ;
④ E hloekile ebile ha e na tšilafalo. Likarolo tsa sebopeho li hlokoa hore li be le coefficient e tlase haholo ea khohlano, tahlehelo e nyane ea matla a kinetic nakong ea ho sisinyeha, 'me ho se be le tšilafalo ea likaroloana tse silang. Lisebelisoa tsa Silicon carbide li na le modulus e phahameng haholo, conductivity ea mocheso le coefficient e tlase ea katoloso ea mocheso, ha ho bonolo ho hlahisa deformation e kobehang ea khatello ea maikutlo le khatello ea mocheso, 'me e na le polishability e ntle haholo, e ka etsoa seiponeng se setle haholo; Ka hona, e na le melemo e mengata ea ho sebelisa silicon carbide e le thepa e nepahetseng ea sebopeho bakeng sa lisebelisoa tsa bohlokoa tsa lipotoloho tse kopantsoeng tse kang mochine oa photolithography, Silicon carbide e na le melemo ea botsitso ba lik'hemik'hale tse ntle, matla a phahameng a mochine, mocheso o phahameng oa mocheso le mocheso o tlaase oa ho atolosa mocheso, 'me e ka sebelisoa ka mocheso o phahameng, khatello e phahameng, kutu le mahlaseli a libaka tse feteletseng.
Silicon carbide e na le melemo ea botsitso ba lik'hemik'hale tse ntle, matla a phahameng a mochine, mocheso o phahameng oa mocheso le mocheso o tlaase oa ho atolosa mocheso, 'me o ka sebelisoa mocheso o phahameng, khatello e phahameng, ho bola le mahlaseli a kotsi a tikoloho.
Thepa ea bohlokoa ea potoloho e kopantsoeng e hloka hore lisebelisoa tsa likarolo li be le litšobotsi tsa boima bo bobebe, matla a phahameng, conductivity e phahameng ea mocheso le coefficient e tlase ea ho atolosa mocheso, 'me e teteaneng ebile e tšoana ntle le mefokolo. Likarolo li hlokoa hore li be le ho nepahala ha maemo a holimo haholo le botsitso bo boholo ho netefatsa motsamao o nepahetseng le taolo ea lisebelisoa. Li-ceramics tsa silicon carbide li na le modulus e phahameng ea elastic le ho satalla ho itseng, ha ho bonolo ho holofala, 'me e na le conductivity e phahameng ea mocheso le coefficient e tlase ea mocheso oa mocheso, botsitso bo phahameng ba mocheso, kahoo li-ceramics tsa silicon carbide ke thepa e ntle ka ho fetisisa ea meralo, ha joale e ntse e etsoa ka potoloho e kopanetsoeng. lisebelisoa tsa bohlokoa ho fumana mefuta e mengata ea lits'ebetso, joalo ka mochini oa lithography o nang le tafole e sebetsang ea silicon carbide, seporo sa tataiso, sets'oants'o, chuck ea ceramic, le phello ea ho qetela ea ceramic.
Fountyl e ka kopana le mochini oa photolithography e le moemeli oa lisebelisoa tsa bohlokoa tsa potoloho tse kopaneng tse nang le boholo bo boholo, lerako le lesesaane le se nang letho, sebopeho se rarahaneng, theknoloji e nepahetseng ea ho lokisa likarolo tsa silicon carbide, joalo ka: silicon carbide vacuum chuck, terene e tataisang, sets'oants'o, tafole ea ho sebetsa. le letoto la likarolo tsa sebopeho sa silicon carbide bakeng sa mochini oa photolithography.
| Thepa | Founyl | ||
| Boima ba 'mele (g/cm3) | 2.98-3.02 | ||
| Young's Modulus (GPa) | 368 | ||
| Flexural matla (MPa) | 334 | ||
| Weibull | 8.35 | ||
| CTE (× 10-6/℃) | 100 ℃ | 2.8×10-6 | |
| 400 ℃ | 3.6×10-6 | ||
| 800 ℃ | 4.2×10-6 | ||
| 1000 ℃ | 4.6×10-6 | ||
| Thermal Conductivity(W/m·k) (20 ºC) | 160-180 | ||
| Karolelano ea Poisson | 0.187 | ||
| Shear modulus (GPa) | 155 | ||