High-Quality Wafer Clamping Solutions for Precision Manufacturing

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Silicon nitride ceramic with excellent physical, chemical, and mechanical properties

Beryllium oxide ceramics with high thermal conductivity and low loss characteristics

Quartz glass melted with various kinds of pure natural quartz

PEEK material with high-performance engineering plastic in excellent heat resistance, chemical resistance, mechanical strength and dimensional stability

Electrostatic chuck with compatibility, high-density, hight structural strength with customized

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High-Quality Wafer Clamping Solutions for Precision Manufacturing

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Beryllium oxide ceramic parts used for auto and semiconductor and large integrated circuit

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Zirconia used for wear resistant parts, heat resistant parts